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A Holding Jig For Dip Coats, And A Dip Coat System Using Same

A technology of holding fixtures and dip coating, which is applied to devices for applying liquid to surfaces, coatings, and the manufacture of record carriers, etc., and can solve problems such as deterioration of productivity, unrealistic, and reduced lifting speed.

Inactive Publication Date: 2016-11-23
KK TOSHIBA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it is unrealistic to reduce the lifting speed and deteriorate productivity.

Method used

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  • A Holding Jig For Dip Coats, And A Dip Coat System Using Same
  • A Holding Jig For Dip Coats, And A Dip Coat System Using Same
  • A Holding Jig For Dip Coats, And A Dip Coat System Using Same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] figure 1 It is a figure which shows the structure of the dip coating system which concerns on embodiment.

[0042] As shown in the figure, the dip coating system 10 according to the first embodiment includes: a dipping tank 9 for accommodating a liquid lubricant as a dip coating liquid; a dip coating holding jig 4 holding a substrate; The lifting mechanism 8 of the dipping tank 9 lifting.

[0043] The elevating mechanism 8 includes: a pair of helical elevating rods 6 placed along the height direction on a base 11 placed in the vicinity of the side surface of the dipping tank 9; and a horizontal bar 5 arranged horizontally with respect to the liquid level of the liquid lubricant, with both ends thereof fixed to the support member 7 .

[0044] The helical elevating rod 6 is rotatably mounted on the base 11 , and can be rotated by a not-shown rotation drive unit, and the support member 7 and the horizontal rod 5 can be raised and lowered according to the direction of rot...

Embodiment 2

[0054] A case where a porous body containing PVA (polyvinyl alcohol) is used instead of the alumina porous body in Example 1 will be described. The PVA used this time is PVA with a pore diameter of 150 μm and a porosity of 91%. PVA is soluble in organic solvents such as alcohol and / or acetone, but is insoluble in fluorine-based solvents that are solvents for lubricants. However, since the porosity is more than 90%, it is softened by immersion in a solvent, so an aluminum jig with a diameter of 10 mm is inserted into the center of the PVA as shown in the figure below to ensure strength as a holding jig.

[0055] PVA is softened by dipping in a solvent in advance. Therefore, in a state where the substrate is held, the substrate holding portion is slightly recessed, and the substrate is stably supported in a vertical posture. Therefore, after the above-mentioned HDD medium was immersed in the liquid lubricant filled in the immersion tank in a supported state, the HDD medium was...

Embodiment 3

[0057] image 3 It is a front view showing an example of the holding member which can be used in the embodiment, Figure 4 It means viewing from the direction of arrow 19 image 3 diagram.

[0058] In this example, a method for further improving the film thickness distribution of a film formed during dip coating will be described in consideration of the volatilization process of the solvent. As shown in the figure, the holding member 17 used is a porous disk member, which is provided with a first convex portion having a diameter D3 equal to or less than the diameter of the first through hole of the substrate at the central portion of the disk 16 having a diameter D1. 13 and a convex region 15 having a second convex portion 14 having a diameter D2 larger than the diameter of the first through hole of the substrate, and a second through hole 22 penetrating the horizontal bar is opened in the center of the convex region 15.

[0059] Figure 5 It is a schematic diagram showing...

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Abstract

The present invention relates to a holding jig for dip coats which forms a film having a uniform film thickness on a substrate and a dip coat system using the same. The holding jig for dip coats involved in the embodiment is equipped with a holding part, and has a first penetration hole having a porous plastid and capable of being inserted in a substrate central area on at least one part.

Description

technical field [0001] Embodiments of the present invention relate to a holding jig for dip coating and a dip coating system using the same. Background technique [0002] In various etching techniques such as electron beam etching, photolithography, nanoimprinting, and polymer and / or microparticle-based self-organization, it is necessary to coat a resist on a substrate. As the resist coating method, there are various methods such as spin coating method, inkjet method, and spray coating method, but the resist layer is formed by vertically lifting the substrate after dipping in the resist solution. The dip coating method is excellent in mass productivity from the viewpoint of the amount of resist used and / or the tact, and is often used in a lubricant coating process for hard disk drive (HDD) media, and the like. [0003] The dip coating method is a method of applying a resist on a substrate by utilizing a meniscus formed at the interface between the substrate and the resist s...

Claims

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Application Information

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IPC IPC(8): B05C13/02B05C3/10
CPCB05C3/09B05D2258/00B05D1/18B05C13/02G11B5/84B05C3/02
Inventor 渡部彰鬼冢刚
Owner KK TOSHIBA
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