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Nano processing method and equipment of atomic cluster beams aiming at organisms

A technology of atomic clusters and nano-processing, applied in ion implantation plating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of breaking vacuum and high vapor pressure, and achieve the effect of enhancing growth

Active Publication Date: 2016-11-16
JIANGSU JICHUANG ATOMIC CLUSTER RES INST CO LTD
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  • Application Information

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Problems solved by technology

This is because the cluster beams fly in vacuum and reach the surface, and the vapor pressure of organic matter is generally relatively high, so if organic matter is used as the substrate to be processed, there is a problem of breaking the vacuum

Method used

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  • Nano processing method and equipment of atomic cluster beams aiming at organisms
  • Nano processing method and equipment of atomic cluster beams aiming at organisms

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Experimental program
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Embodiment Construction

[0021] Such as figure 1 As shown, we introduced methods to limit the nozzle angle, introduce secondary nozzles, and extend the growth zone to achieve progress. Such as figure 2 , we design differential pumping to limit the scale and realize the online processing of organic matter.

[0022] The growth of the cluster is strengthened; the cluster beam of various mass components is realized at the same speed, or the ion is accelerated; the method of differential pumping is used to isolate the vacuum of the beam and the sample to be processed.

[0023] The cluster beam source chamber has chambers I, II and III connected in series; through the nozzle angles between chambers I and II or between chambers II and III, the atomic cluster beams grow at equal speeds, and the nozzle angles are open The angle of the organic atomic cluster beam is generated in room I, room II and room III; the ratio of length to size of room I, room II and room III is 3:1:1; Occasionally, the opening angl...

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Abstract

The invention relates to a nano processing method aiming at organisms on the basis of atomic cluster beams. Vacuum nano processing is performed on the organisms with high vapor pressure by utilizing the cluster beams, so that nano particles reach the surfaces of the organisms and functionally grow; the momentum of atomic cluster ions reaches 1.5*10<8> amu m / s; the organisms with high vapor pressure are solid materials of which the vapor pressure is 0.1 to 100 Pa at room temperature. A chamber I, a chamber II and a chamber III which are connected in series are formed in a generating device of the atomic cluster beams of the organisms; the growth of the atomic cluster beams at the same speed is realized by adjusting an opening angle of a nozzle between the chamber I and the chamber II or / and between the chamber II and the chamber III, and the opening angle of the nozzle is 5 to 35 degrees.

Description

technical field [0001] The invention relates to a method and equipment for nano-processing of organisms with atomic cluster beams. Background technique [0002] Atomic cluster is an interdisciplinary subject between atomic physics, nuclear physics and material physics, which characteristically provides a cluster ion beam current [1,2] , can be used as ultra-shallow implantation and nano-processing and other industrial applications. The method of synthesizing nanoclusters by gas-phase condensation is to first use evaporation, ion bombardment and laser action to generate high-density molecular vapor of the target material, and then introduce a high-flow low-temperature inert gas (buffer) to collide with it to undergo multi-body collisions gradually. A method of agglomerative growth into nanoclusters. Among them, the target material of nano-clustering can be various condensed materials that can provide sufficient vapor pressure or can effectively sputter, or even gas, which e...

Claims

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Application Information

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IPC IPC(8): C23C14/48C23C14/22
CPCC23C14/221C23C14/48
Inventor 王学锋
Owner JIANGSU JICHUANG ATOMIC CLUSTER RES INST CO LTD
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