Embedded piezoresistive micro stress sensor

A stress sensor, embedded technology, applied in the direction of instruments, measuring force, measuring devices, etc., can solve the problems of large size, unable to meet the requirements of solid engine interface stress measurement, etc., to achieve the effect of reducing interference

Inactive Publication Date: 2016-09-21
XIAN AEROSPACE PROPULSION TESTING TECH RES INST
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Problems solved by technology

However, similar domestic sensors are larger in size, with a diameter of 15mm and a thickne

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  • Embedded piezoresistive micro stress sensor

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Embodiment Construction

[0019] Embodiments of the present invention are described in detail below, and the embodiments are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0020] According to the deficiencies of the existing domestic stress sensor technology, the present invention provides a piezoresistive-based embedded miniature stress sensor, which is used to measure the interface stress or internal stress of a solid engine that requires a small volume of the embedded or embedded stress sensor.

[0021] Such as figure 1 As shown, the miniature stress sensor of the present invention is a flat cylindrical structure as a whole, which is composed of a shell, a chip resistor, a sensitive element, a printed electrode, and a bottom plate. The shell is composed of a ring structure with a thickness of 1.8mm and a diameter of 7.8mm and a stainless steel circular diaphragm embedded and fixed at one end of the ring structure; the sensiti...

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Abstract

The invention provides an embedded piezoresistive micro stress sensor which is composed of a shell, chip resistors, sensitive elements, printed electrodes and a baseplate. The shell is composed of an annular structural component of which the thickness is 1.8mm and the diameter is 7.8mm and a stainless steel circular film which is fixedly installed at one end of the annular structural component in an embedded way. Diffusion silicon piezoresistive sensitive elements are adopted to act as the sensitive elements. Two sensitive elements are arranged at the central position of the circular film. The other two sensitive elements are arranged at the edge position of the film. According to the designed piezoresistive micro stress sensor, a microelectronic micromechanical technology is adopted so that the flat micro contour of the stress sensor can be realized, and the stress sensor can be conveniently installed in a solid engine to perform interface stress measurement. Besides, the stress sensor has a tension and compression bidirectional measurement function so that the stress sensor can measure compression stress and can also measure tension stress.

Description

technical field [0001] The invention relates to the technical field of piezoresistive stress sensors, in particular to an embedded piezoresistive miniature stress sensor. The test of material interface stress or internal stress. Background technique [0002] Structural health detection is very important for the safety and reliability of solid-state engines, and the ability to detect engine damage in real time, accurately, and reliably contributes to the assessment of engine structural integrity, reduces manufacturing costs, and avoids catastrophic structural accidents. Miniature stress sensors can be used for real-time stress testing of composite materials such as solid engines, ships and aircrafts, to determine and evaluate the quality and life of products, and to monitor and manage the health of products throughout their life cycle. [0003] Domestically, the engine health monitoring technology based on stress and strain is in its infancy. Foreign countries have used min...

Claims

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Application Information

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IPC IPC(8): G01L1/22
CPCG01L1/225G01L1/2287
Inventor 邓海涛翟江源王忠颐周向东李秀君
Owner XIAN AEROSPACE PROPULSION TESTING TECH RES INST
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