Radio frequency CO2 laser device and unstable-waveguide mixing chamber thereof

Abstract

The invention discloses a radio frequency CO2 laser device and an unstable-waveguide mixing chamber thereof. The unstable-waveguide mixing chamber comprises a waveguide system and an optical feedback system. The waveguide system comprises a pair of plate electrodes, the optical feedback system comprises a first resonance chamber lens and a second resonance chamber lens that are arranged opposite to two longitudinal tail ends of the pair of plate electrodes, a first waveguide extension block is arranged between one longitudinal tail end of the pair of plate electrodes and the first resonance chamber lens, the first waveguide extension block extends in a longitudinal direction toward the first resonance chamber lens, and therefore waveguide length is increased; the first waveguide extension block is made of a metal material or an electrical insulating material; when the first waveguide extension block is made of the metal material, and an electrical insulator is arranged between the first waveguide extension block and the pair of plate electrodes so as to insulate the first waveguide extension block from the pair of plate electrodes. Via the above structure, coupling loss of laser beams between the electrodes and a resonance chamber can be reduced, and pollution and damage brought to resonance chamber lenses by plasma electro-discharge can be kept at a low level.

Description

technical field [0001] The invention relates to a radio frequency CO2 laser, in particular to a radio frequency CO2 laser and an unstable-waveguide hybrid cavity. Background technique [0002] Due to its excellent performance and wide application, RF CO2 lasers are developed by manufacturers at home and abroad. In addition, the operation mode of RF CO2 lasers can be selected among continuous, pulse, gain switch and Q-switching, which brings many advantages to processing. Flexibility, which has won the favor of people in industries such as material processing, medical surgery and lidar. Therefore, there are many researches on RF CO2 lasers, such as output power, output power stability, compact size and prolonging its working life. [0003] The RF slab CO2 laser is a promising laser among the RF CO2 lasers. Its optical resonator is an unstable-waveguide hybrid cavity, and its structure is mainly composed of two parts: an optical feedback system and a waveguide system. Among ...

AI Technical Summary

Problems solved by technology

Therefore, for conventional RF CO2 lasers, the distance D2 between the end face of the waveguide and the resonator mirror is generally very large, resulting in a large coupling loss of the beam

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