A full-temperature zone thermoelectric two-field scanning electron microscope in-situ physical property measurement platform and measurement method

Abstract

The invention discloses a full-temperature-area thermoelectricity bi-field SEM in-situ physical property testing desk which comprises a sample, a sample pressing sheet, a heat conduction bench, a temperature measurement element, a heating element, a sample bench cover, a cooling bench top, a cooling pipe, a cooling bench bottom, a heat insulation bench top, a heat insulation pole, a heat insulation bench bottom, an SEM connecting pole, a function expansion aperture, a cooling pipe hole, a cable hole, a vacuum flange module, a cooling control module and a PID temperature control and electricity test module. Thermoelectric properties of sample materials can be researched, and research on in-situ performance under regulation and control of multiple physical fields of mechanics, electricity and calorifics can be realized, and rapid refrigeration cooling is achieved. Heat conduction effect is reduced by making full use of the structure of a sample bench, and discharging phenomenon and layered lines due to image heat interference in a heating process can be prevented. A coaxial annular heating module is employed, and red copper with excellent thermal conductivity is used for making a sample heat conduction bench. The temperature measurement element is arranged between the heating module and a sample, and accurate temperature measurement can be realized.

Description

Technical field [0001] The invention belongs to the technical field of micro-nano materials, and particularly relates to a thermoelectric two-field scanning electron microscope in-situ physical property measurement platform and a measurement method in a full-temperature zone. Background technique [0002] The in-situ technology in the scanning electron microscope is currently a rapidly developing research field. It can observe and study the structural changes and physical properties of materials and devices in real time under microscopic size conditions, which is conducive to accurately understanding the actual use effects of materials and devices. Thermoelectricity and phase change are important properties of materials and devices, which can reflect many physical properties of materials and devices. Thermoelectric materials with thermoelectric properties can realize the mutual conversion of heat and electric energy, without mechanical parts, no noise, and realize thermoelectric ...

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to provide a thermoelectric two-field scanning electron microscope in-situ physical property measurement platform and measurement method in the whole temperature zone, aiming at solving the problem that the existing commercial or self-developed scanning electron microscope variable temperature sample platform has a small temperature zone and has great impact on material research. Limitations: multi-physics fields cannot be expanded, resulting in a single function, unable to realize material performance research under multi-field regulation, poor heat dissipation effect of the sample stage, temperature changes and sample drift caused by electron beam irradiation, and uneven temperature distribution of the sample stage question

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