Grating offset monitoring adjusting device and method in vacuum compression chamber
A technology for vacuum compression chambers and adjustment devices, which is applied in the direction of measuring devices, optical instrument testing, and optical performance testing. The effect of simple structure
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[0035] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0036] see first figure 1 , figure 1 It is a schematic diagram of the overall structure of the vacuum compression chamber grating misalignment monitoring and adjusting device of the present invention. The device consists of:
[0037] Dichroic prism, first half mirror, first far-field detection system, first autocorrelator, third half mirror, fourth half mirror, second far-field detection system, second autocorrelator, A double-pass single-parallel grating pair compressor composed of the first grating, the second grating, the third grating, and the fourth grating, and the first plane mirror and the second half-anti-half placed between the second grating and the third grating The lens and the second plane mirror, the double-pass single-parallel grating pair compressor are ...
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