Microshell vibrating gyroscope and preparation method thereof

Abstract

The invention discloses a micro shell vibration gyroscope and a preparation method thereof. The micro shell vibration gyroscope comprises a micro shell gyroscope harmonic oscillator and a glass substrate. The micro shell gyroscope harmonic oscillator is arranged on the glass substrate; the micro shell gyroscope harmonic oscillator comprises a rotating shell and a plurality of sensitive mass components; the sensitive mass components are uniformly distributed on the periphery of the bottom of the rotating shell; metal films are arranged on surfaces of the rotating shell and the plurality of sensitive mass components, which are opposite to the glass substrate; the glass substrate comprises a plurality of fixed capacitor plates; the plurality of fixed capacitor plates correspond to the plurality of sensitive mass components. The preparation method comprises: preparing the micro shell gyroscope harmonic oscillator by a high-accuracy contact pattern; carrying out micro assembling. The micro shell vibration gyroscope carries out driving and detection based on out-of-plane, and has the advantages of convenience in machining, high machining accuracy, high driving and detecting efficiency, convenience in mode and frequency trimming, good robustness, low cost and the like. The preparation method can greatly improve surface form machining accuracy of a three-dimensional curved surface and structural symmetry of the micro shell gyroscope harmonic oscillator.

Description

technical field [0001] The invention belongs to the field of micro-mechanical sensors, in particular to a vibrating gyroscope with a micro-shell and a preparation method thereof. Background technique [0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space. It is the core device in the fields of motion measurement, inertial navigation, guidance and control, etc. It plays a very important role in high-end industrial equipment and precision strike weapons such as aerospace, intelligent robots, and guided munitions. Value. [0003] At present, based on micromachining technology, batch processing of sensors can be realized on wafers, and the processing of micro gyroscopes with small size, low cost and low power consumption has been realized. After years of development, the accuracy of MEMS gyroscopes has reached the rate level, and it has a wide range of applications in the automotive and consumer electronics fields (t...

AI Technical Summary

Problems solved by technology

Although the in-plane working method of the arc surface working electrode can greatly increase the area of ​​the driving and detection electrodes, it is difficult to realize the machining of the arc surface capacitance with micro-scale high-precision electrode gap due to the limitation of the current three-dimensional micromachining technology.

Based on the out-of-plane working mode of the parallel plate working electrode, the electrode gap is easy to ensure and the consistency is good, but the capacitance area is relatively small, and the driving and detection efficiency is low

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