Vibration station for transverse sensitivity calibration of piezoelectric acceleration sensor

Abstract

The invention discloses a vibration station for transverse sensitivity calibration of a piezoelectric acceleration sensor and belongs to the machinery manufacturing technology field. The vibration station comprises a planar two-axis vibration generation device fixed by a flexible hinge mechanism, the flexible hinge mechanism comprises a terminal platform at the middle portion, input platforms arranged at the upper side, the lower side, the left side and the right side of the terminal platform and a rigidity connection matrix which are connected through a straight beam type flexible hinge, the flexible hinge mechanism is driven to do motion by the planar two-axis vibration generation device through a piezoelectric ceramic driver, displacement signals of a terminal platform conversion block are acquired and fed back through a length meter, the piezoelectric acceleration sensor on the terminal platform conversion block is driven to do motion with relatively high frequency, the piezoelectric acceleration sensor can do high-frequency high-precision planar circular locus motion, centripetal acceleration amplitude stability and frequency stability of the piezoelectric acceleration sensor are high, and thereby transverse sensitivity calibration of the piezoelectric acceleration sensor can be realized.

Description

technical field [0001] The invention belongs to the technical field of mechanical manufacturing, in particular to a vibrating table for lateral sensitivity calibration of piezoelectric acceleration sensors. Background technique [0002] A sensor is a device that converts the measured non-electricity into an electrical signal corresponding to it. It is the core of information acquisition and plays an important role in the current scientific and technological progress. At present, with the expansion of human exploration fields and space, people are more dependent on the collection technology to obtain external information. Sensors have penetrated into industrial production, national defense construction, space development, ocean exploration, environmental protection, resource exploration, medical diagnosis, bioengineering , and even an extremely wide range of fields such as the protection of cultural relics. Piezoelectric acceleration sensors began to be mass-produced in the ...

AI Technical Summary

Problems solved by technology

[0005] At present, the two-axis vibration table mainly adopts the resonant beam device based on the amplitude ratio and phase difference. The resonant beam needs to work near the resonant frequency, and the amplitude and frequency stability of the generated acceleration need to be improved, and the control is difficult.

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