Indoor detection method of wave aberration under different elevation angles of large-aperture photoelectric detection system
A technology of photoelectric detection and detection method, which is used in optical instrument testing, measuring devices, testing optical performance and other directions, can solve the problems of measurement error in medium and high frequency parts, increase in instrument volume, weight, and difficulty in controlling tilt error, and achieve precision and repeatability. High performance, improve measurement accuracy, and improve the effect of sampling density
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[0055] The indoor detection method of the wave aberration under different elevation angles of the large-aperture photoelectric detection system of the present invention specifically proposes: (1) adopting a polygonal mirror scanning system to realize the technical scheme of sub-aperture scanning; (2) improving the sub-aperture absolute slope measurement to relative slope measurement (3) design an integrated sub-aperture two-dimensional tilt error monitoring optical path; (4) the present invention can also effectively realize the light weight of the measuring equipment, and based on this, it is proposed that the testing equipment and the photoelectric detection system to be tested are fixedly connected and used to utilize Its pitch axis system provides technical solutions for different elevation angles. At present, we have developed a principle verification test device, and have actually verified the effectiveness of the above-mentioned content of the invention through experimen...
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