Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof

Abstract

The invention provides a disc multiple-ring inner S-shaped flexible beam resonance gyro and a preparation method thereof. The disc multiple-ring inner S-shaped flexible beam resonant gyro comprises a substrate, a disc multiple-ring inner S-shaped flexible beam resonator and a group of electrodes distributed at the periphery of the disc multiple-ring inner S-shaped flexible beam resonator, wherein the disc multiple-ring inner S-shaped flexible beam resonator comprises a central cylinder, a plurality of S-shaped flexible beams, a plurality of concentric rings and a plurality of groups of spokes, the central cylinder is connected with the substrate, the concentric rings are connected through a plurality of spokes, two ends of each of the plurality of S-shaped flexible beams are connected with the central cylinder and the inner side of the smallest concentric ring in the plurality of concentric rings, and each of the electrodes is connected with the substrate. The disc multiple-ring inner S-shaped flexible beam resonance gyro has the advantages of a small size, stable structure, sensitive response, etc.; and the gyro has good symmetry, so high performance is obtained.

Description

technical field [0001] The invention relates to a gyroscope in the field of micro-electromechanical technology, in particular to a resonant gyroscope with S-shaped flexible beams in a disc multi-ring and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life...

AI Technical Summary

Problems solved by technology

However, since the rod part of the early rod structure resonators needs to be assembled on the micromechanical mechanism, higher dynamic loads and imprecise connections at the joints will lead to larger deflection of the hemispherical resonator in the long run

Images