High precision constant temperature control device and method

A constant temperature control, high-precision technology, applied in non-electric variable control, control/regulation systems, simultaneous control of multiple variables, etc., can solve problems such as high prices and achieve the effect of suppressing the impact

Active Publication Date: 2017-10-03
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Existing high-precision thermostatic control devices on the market are expensive

Method used

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  • High precision constant temperature control device and method
  • High precision constant temperature control device and method
  • High precision constant temperature control device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] See attached figure 1, attached figure 2 And attached image 3 , the high-precision constant temperature control device of the present invention includes a gas source module 100, a heat exchange module 200, a gas storage module 300 and a control module 400; The modules 300 are in communication, and the control module 400 is in communication with the heat exchange module 200 through pipes.

[0035] The air source module 100 includes an air source 101, an air source valve 102, and an air source safety valve 103; the air source 101 communicates with the heat exchange module 200 through a pipeline I, and the pipeline I is sequentially provided with an air source valve 102 and an air source safety valve 103. Valve 103.

[0036] The heat exchange module 200 includes a primary heat exchanger 201, a thermometer I 204, a secondary heat exchanger 202, a thermometer II 205, and a constant temperature water bath device 203; the primary heat exchanger 201 has the same structure ...

specific Embodiment 2

[0055] The difference between this embodiment and the first embodiment is that the heat exchange medium in step one is water.

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Abstract

The high-precision constant temperature control device and method of the present invention belong to the field of constant temperature control, and solve the technical problem of detection errors caused by temperature changes in the interference cavity when detecting ultra-high-precision optical elements and optical systems in the prior art: the invention includes: Air source module, heat exchange module, air storage module and control module; the air source module is communicated with the heat exchange module through pipes, the heat exchange module is communicated with the gas storage module 300 through pipes, and the control module is communicated with the heat exchange module through pipes; this The invention satisfies the requirements of ultra-high precision optical measurement on temperature stability; the invention is provided with an air stirring device, which realizes the irregular stirring of the air and well suppresses the influence of airflow disturbance on high precision optical measurement.

Description

technical field [0001] The invention belongs to the field of constant temperature control, and in particular relates to a high-precision constant temperature control device and method. Background technique [0002] In order to achieve the required resolution and critical size of the projection lithography objective lens, the wave aberration of the optical system needs to reach the diffraction limit. The extreme ultraviolet lithography works in the extreme ultraviolet band with a wavelength of 13-14nm, which requires that the wave aberration of the optical system should be less than 1nmRMS, and the surface deviation of a single mirror should be 0.25nmRMS. To achieve such high-precision optical processing, it is first necessary to realize ultra-high-precision optical detection technology. In the process of ultra-high-precision optical detection, slight changes in the temperature of the interference cavity will have a great impact. Existing high-precision thermostatic control...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05D27/02
CPCG05D27/02
Inventor 金春水马冬梅于杰张海涛
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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