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Pipeline-free material adsorption apparatus and method used for high-precision workpiece table

A technology of adsorption device and workpiece table, which is applied in the direction of photolithography exposure device, microlithography exposure equipment, etc.

Active Publication Date: 2016-02-03
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] At present, there is no adsorption device applied in the atmospheric environment and without pipeline connection at home and abroad.

Method used

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  • Pipeline-free material adsorption apparatus and method used for high-precision workpiece table
  • Pipeline-free material adsorption apparatus and method used for high-precision workpiece table

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Embodiment Construction

[0027] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0028] Such as figure 1 As shown, in the first embodiment of a pipelineless material adsorption device for a high-precision workpiece table of the present invention, the material adsorption device includes a suction cup 3, a cylinder 6, a piston 8 and a motor 7, and also includes a support seat 4 , used to support cylinder 6. A sealing ring 5 is also included between the suction cup 3 and the support base 4 . The suction cup 3 is a bump type, and the bump 2 supports the material 1 to prevent vertical deformation. Suction cup 3 inside has pipeline to connect cylinder 6. The motor 7 drives the piston 8 to move, so that negative pressure appears in the cylinder 6, so that the suction cup 3 absorbs the material 1. After the adsorption vacuum is formed, the motor stops moving, and the motor will not generate interference during the working time...

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Abstract

The invention discloses a pipeline-free material adsorption apparatus used for a high-precision workpiece table. The pipeline-free material adsorption apparatus is characterized by comprising a suction cup, an air cylinder, a piston and a motor; a pipeline in the suction cup is connected with the air cylinder; and the motor drives the piston to move to cause negative pressure in the internal of the air cylinder and to enable the suction cup to absorb materials. Compared with the prior art, the pipeline-free material adsorption apparatus has no external air source, so that pressure loss in a transmission path and the interference from a pipeline are avoided; and meanwhile, the pipeline-free material adsorption apparatus is not limited by the environment, so that the pipeline-free material adsorption apparatus can be applied to the atmospheric environment.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a pipeless material adsorption device and method for a high-precision workpiece table of a photolithography machine. Background technique [0002] The workpiece table of the lithography machine generally uses a suction cup as an adsorption device for materials (materials or substrates). At present, the adsorption methods for materials used at home and abroad are mainly pipeline vacuum adsorption and electrostatic adsorption. [0003] 1. Pipeline vacuum adsorption: [0004] The pipeline is used to introduce vacuum from the external air source to the suction cup to complete the material adsorption, which is only applicable to the general atmospheric environment. The vacuum adsorption method is restricted by the pipeline. There is a certain vacuum pressure drop in the pipeline transmission. If the pipeline is too long, the adsorption force will be insuffic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
Inventor 李新振齐芊枫李进春
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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