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Composite barrier structure having self-restoration capability

A technology with functional structure and capability, applied in the field of electroluminescent device preparation, can solve the problems of reducing the display quality and service life of OLED devices, unsatisfactory water and oxygen barrier effect, and deteriorating OLED devices, etc., and achieves excellent water and oxygen barrier properties, good Good performance, uniformity and compactness

Active Publication Date: 2016-01-27
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Most of its components are organic, so it is particularly sensitive to any traces of moisture and oxygen in the space. Moisture and oxygen will degrade the components of OLED devices, especially weaken its luminous ability, and seriously reduce the display of OLED devices. Therefore, the effective packaging of OLED devices is the key technology for its industrialization and flexible display, but the water and oxygen barrier effect of the currently prepared packaging structure is not ideal.

Method used

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  • Composite barrier structure having self-restoration capability
  • Composite barrier structure having self-restoration capability
  • Composite barrier structure having self-restoration capability

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] In this example, see figure 1 , a composite barrier structure with self-healing ability, has multiple functional structural layers, including sequentially stacking base Al on the substrate 1 2 o 3 Layer 2, Middle Aluminum Layer 3, Middle Al 2 o 3 Layer 4 and the outer dense structure layer, substrate 1 adopts polyimide PI flexible substrate, base Al 2 o 3 Layer 2 constitutes the first barrier layer, and the outer dense structure layer is the outer Al 2 o 3 Thin film layer 5, the outer dense structure layer can block the penetration of water and oxygen molecules, the middle Al 2 o 3 Layer 4 and the outer dense structure layer together constitute the second barrier layer, and the pure aluminum layer 3 is used as a repair agent layer, which can 2 o 3 Layer 2 and middle Al 2 o 3 When gap defects appear in layer 4, Al atoms are provided, and Al atoms are spontaneously oxidized at the defects to form Al 2 o 3 , to fill in the corresponding defects.

[0031] In ...

Embodiment 2

[0051] This embodiment is basically the same as Embodiment 1, especially in that:

[0052] In this example, see figure 2 , the outer dense structure layer is the outer SiN X Layer 6. The difference between this example and Example 1 is that the top barrier layer uses PECVD to prepare SiN X Layer 6, SiN prepared by PECVD X It also has good barrier properties, and the combination of the two further enhances the water and oxygen barrier properties.

Embodiment 3

[0054] This embodiment is basically the same as the previous embodiment, and the special features are:

[0055] In this example, see image 3 , the outer dense structure layer is the outer SiO 2 Layer 7. The difference between this example and the previous examples is that the topmost barrier layer uses PECVD to prepare SiO 2 Layer 7, SiO prepared by PECVD 2 It also has good barrier properties, and the combination of the two further enhances the water and oxygen barrier properties.

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Abstract

The invention discloses a composite barrier structure having the self-restoration capability. The composite obstruction structure has a plurality of functional structure layers, and includes a basic Al2O3 layer, a middle aluminium layer, a middle Al2O3 layer, and an external compact structure layer that are successively superposed on a substrate, the basic Al2O3 layer forms a first barrier layer, the external compact structure layer can obstruct water and oxygen molecules to pass through, the middle Al2O3 layer and the external compact structure layer form a second barrier layer together, a pure aluminium layer is a repairing agent layer which supplies Al atoms when the superposed basic Al2O3 layer and middle Al2O3 layer have slit defects, and the Al atoms spontaneously oxidate at the defect parts to form Al2O3 to fill the corresponding defects. The composite barrier structure having the self-restoration capability has an excellent water and oxygen barrier property, an excellent repeated bending property, and the self-restoration capability after the defects are formed, and has wide application prospects on the improvement of the water and oxygen barrier property and the bending property of a flexible substrate.

Description

technical field [0001] The invention relates to an electronic device packaging structure, in particular to an organic electroluminescent device packaging structure, which is applied in the technical field of electroluminescent device preparation. Background technique [0002] Compared with inorganic electroluminescent devices, organic electroluminescent devices (OrganicLightEmittingDevice, OLED) have a wide range of material selection, can realize full-color display from blue light region to red light region, low driving voltage, high luminous brightness and luminous efficiency, Wide viewing angle, fast response speed, relatively simple production process, low cost, and flexible display can be realized. Therefore, it has developed rapidly in the past 20 years, and related industries are already in the initial stage of industrialization. Organic electroluminescence Devices are generally considered to be the mainstream of next-generation display devices. [0003] OLED is a cu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/52
CPCH10K50/844
Inventor 张建华张帅陈龙龙
Owner SHANGHAI UNIV
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