Wafer test result comparison method and wafer test result comparison system

A technology for wafer testing and test results, which is applied in semiconductor/solid-state device testing/measurement, special data processing applications, instruments, etc. It can solve the problems of poor efficiency, low accuracy of manual comparison, and inability to automatically compare wafer test results and other issues to achieve the effect of improving accuracy and efficiency

Active Publication Date: 2016-01-06
SEMICON MFG INT (SHANGHAI) CORP
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Due to the difference in wafer angle and coordinates, different wafer test results cannot be directly compared, which is another reason why automatic comparison of wafer test results cannot be realized
[0006] It can be seen that there are problems in the prior art that automatic comparison of wafer test results cannot be performed, while manual comparison has low accuracy and poor efficiency

Method used

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  • Wafer test result comparison method and wafer test result comparison system
  • Wafer test result comparison method and wafer test result comparison system
  • Wafer test result comparison method and wafer test result comparison system

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Embodiment 1

[0051] An embodiment of the present invention provides a method for comparing wafer test results, which is used to realize automatic comparison of wafer test results, so as to improve comparison efficiency and accuracy.

[0052] Below, refer to Figure 4The wafer test result comparison method proposed by the embodiment of the present invention will be described. Figure 4 It is a flow chart of a method for comparing wafer test results in an embodiment of the present invention.

[0053] The wafer test result comparison method of the present embodiment comprises the following steps:

[0054] Step A1: Obtain the first set of wafer test results and the second set of wafer test results.

[0055] Wherein, the first group of wafer test results and the second group of wafer test results can be obtained through the wafer probe test, or the first group of wafer test results and the second group of wafer test results can be directly read from the storage device. result.

[0056] The ...

Embodiment 2

[0085] An embodiment of the present invention provides a wafer test result comparison system, which can be used to implement the wafer test result comparison method described in the first embodiment.

[0086] like Figure 5 As shown, the wafer test result comparison system of the present embodiment includes:

[0087] Wafer test result acquisition unit 501, configured to acquire the first set of wafer test results and the second set of wafer test results;

[0088] A file format parsing unit 502, configured to parse the first set of wafer test results and the second set of wafer test results into the first set of test result analysis data and the second set of test result analysis data;

[0089] The wafer angle and coordinate adjustment unit 503 is used to judge whether the wafer angle and coordinates of the first set of test result analysis data and the second set of test result analysis data match. The second set of test result analysis data is adjusted to match the wafer an...

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Abstract

The invention provides a wafer test result comparison method and a wafer test result comparison system, and relates to the technical field of a semiconductor. The wafer test result comparison method comprises the following steps of: performing file format parsing on the first group of wafer test results and the second group of wafer test results; judging whether the wafer angles and the coordinates of the parsed data are matched or not; and regulating the wafer angles and the coordinates. The automatic comparison on the wafer test results can be realized, so that the comparison accuracy and the comparison efficiency can be improved. The wafer test result comparison system comprises a file format parsing unit and a wafer angle and coordinate regulating unit; the automatic comparison on the wafer test results can be realized, so that the comparison accuracy and the comparison efficiency can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method and system for comparing wafer test results. Background technique [0002] In the manufacturing process of semiconductor devices, it is often necessary to compare the test results of different wafers on a die-by-die basis, and generate a corresponding report according to the comparison results. [0003] The currently commonly used method of comparing wafer test results is to convert two groups of wafer test results into figure 1 The two wafer test maps (WaferTestMap) shown are then compared manually (seeing with eyes). However, manual comparison can only find obvious differences in the two groups of test results, so it is impossible to achieve accurate and comprehensive comparison of wafer test data, and has the problem of low comparison efficiency. [0004] Since wafer test results are usually poorly readable binary files or some complex text files, automatic c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F19/00H01L21/66H01L21/67
Inventor 邵金辉
Owner SEMICON MFG INT (SHANGHAI) CORP
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