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Wavefront sensor and wavefront measurement method

A wavefront sensor and wavefront measurement technology, applied in measurement devices, instruments, optical devices, etc., can solve the problems of difficulty in manufacturing random coded amplitude gratings, and achieve the effects of low manufacturing cost, large size, and high interference contrast.

Active Publication Date: 2018-03-20
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, in randomly coded hybrid gratings, the fabrication of randomly coded amplitude gratings is difficult

Method used

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  • Wavefront sensor and wavefront measurement method
  • Wavefront sensor and wavefront measurement method

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Embodiment Construction

[0026] The present invention will be further described below in conjunction with the examples and drawings, but the examples should not limit the protection scope of the present invention.

[0027] A wavefront sensor 1, comprising a two-dimensional randomly coded hybrid grating 101 and a detector 102;

[0028] The two-dimensional randomly coded hybrid grating 101 is a two-dimensional grating with the same grating period in the x and y directions, and is composed of a randomly coded amplitude grating 1011 with a period of 50 μm and a checkerboard phase grating 1012 with a period of 100 μm. The period T of the grating 101 is 100 μm, the central wavelength of the checkerboard phase grating 1012 is 532 nm, the duty cycle is 50%, the phase change of adjacent phase units at the central wavelength is π, the distance between the detector CCD102 and the grating 101 The spacing is 1 cm, and the aperture of the wavefront sensor 1 is 1 cm.

[0029] The randomly coded amplitude grating 10...

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Abstract

A wavefront sensor and wavefront measurement method, characterized in that the wavefront sensor includes a two-dimensional random coded hybrid grating and a detector, the two-dimensional random coded hybrid grating is composed of a random coded amplitude grating and a checkerboard phase grating, optimized The pixel size of the amplitude grating is randomly encoded, which reduces the difficulty of processing and does not affect the accuracy of wavefront measurement.

Description

technical field [0001] The invention relates to wavefront measurement, in particular to a wavefront sensor and a wavefront measurement method. Background technique [0002] Wavefront measurement technology is playing an increasingly important role in the fields of modern physics, biomedicine and engineering technology. Grating shearing interference wavefront measurement technology has the advantages of no need for reference wavefront, anti-environmental interference, and large measurement dynamic range. It has been widely used in the fields of beam collimation measurement, optical system wave aberration measurement, and optical component surface shape measurement Applications. [0003] An improved Hartmann mask is composed of a crossed grating with a duty ratio of 2 / 3 and a phase grating with a duty ratio of 1 / 2, wherein the period of the phase grating is twice that of the crossed grating, the combination The grating eliminates the 3rd and multiple diffraction orders (see ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
Inventor 李杰唐锋王向朝戴凤钊
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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