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Process for preparing Ti-Al-N series high-temperature wear-resistant films with different ingredients by virtue of single sputtering

A high-temperature wear-resistant and sub-sputtering technology, applied in the field of high-temperature wear-resistant thin films, can solve the problems of difficult preparation of alloy targets, high hardness, and high cost, and achieves high cost, simplified research process, and complicated target making. Effect

Inactive Publication Date: 2015-09-30
CHANGZHOU INST OF MECHATRONIC TECH
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  • Application Information

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Problems solved by technology

However, at present, the adjustment of the film composition is mainly by replacing the alloy target with the corresponding ratio. Due to the high hardness and brittleness when the content of Ti and Al is high, the preparation of the alloy target is difficult and expensive, which limits its application.

Method used

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  • Process for preparing Ti-Al-N series high-temperature wear-resistant films with different ingredients by virtue of single sputtering
  • Process for preparing Ti-Al-N series high-temperature wear-resistant films with different ingredients by virtue of single sputtering
  • Process for preparing Ti-Al-N series high-temperature wear-resistant films with different ingredients by virtue of single sputtering

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Embodiment

[0020] The method of double-target reactive co-sputtering is adopted. The double targets are made of pure metal Ti target and Al target. The two targets are placed symmetrically at 90° relative to each other. The angles are all 45°, such as figure 1 Show. Both targets have a purity of 99.99% and are of the same size.

[0021] In order to systematically study the differences in film structure, morphology, and performance at different sputtering positions, the sample stage is divided into six areas on average, and the positions closest to the Ti target and Al target are marked as P1 and P6, respectively. Numbered sequentially, 12 substrates were placed on average in these 6 areas along the centerline of the double target and labeled from S1 to S12, among which the substrate closest to the titanium target was marked as S1, and the substrate closest to the aluminum target was marked as S12.

[0022] Before the coating starts, the background vacuum is pumped to higher than 5×10 ...

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Abstract

The invention relates to a process for preparing Ti-Al-N series high-temperature wear-resistant films with different ingredients by virtue of single sputtering. The process adopts a two-target reaction co-sputtering method, wherein the two targets adopt a pure metal Ti target and a pure metal Al target, and are placed symmetrically at an angle of 90 degrees relatively; a matrix is placed along the line of the centers of the two targets, and the angle between each of the two targets and the matrix is 45 degrees; and by virtue of single sputtering, a series of films with different ingredients are prepared on a hard alloy or ceramic matrix on a sample platform. The process provided by the invention has the beneficial effects that the difficulties of complex target preparation and high cost can be effectively solved by adopting a two-target (the Ti target and the Al target) magnetron co-sputtering method; and the chemical components of the films can be conveniently controlled by changing the position of the matrix, so that the research process is greatly simplified, and the cost is effectively reduced.

Description

technical field [0001] The invention relates to a process for preparing Ti-Al-N series high-temperature wear-resistant films with different compositions by single sputtering. , aerospace, thermal energy nuclear power and other fields of development. Background technique [0002] With the development of modern processing technology, especially the emergence of high-performance cutting processing methods under high-speed, high-temperature extreme service conditions, it is required that the coating on the surface of the tool should have higher hardness, excellent friction and wear properties, and have better High temperature oxidation resistance. However, although the existing tool coatings have high hardness, their friction and wear properties are not ideal. At the same time, due to high-temperature oxidation, the film falls off the surface of the tool, which greatly reduces the performance of the tool and shortens its service life sharply. It cannot meet the higher requirem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06
Inventor 张晔刘蓉怡张子鹏
Owner CHANGZHOU INST OF MECHATRONIC TECH
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