System and method for processing substrates

Abstract

The present invention relates to a system for processing coated substrates, having the following features: at least one evacuable process box for accommodating at least one substrate with a gas-tightly sealable housing, which forms a hollow space, wherein the housing comprises at least one housing section, which is implemented such that the substrate is thermally treatable by incident electromagnetic thermal radiation, wherein the housing has at least one housing section coupleable to a cooling device for its cooling and at least one housing section not coupled to the cooling device, wherein the hollow space is divided by at least one separating wall into a process space for accommodating the substrate and an intermediate space, wherein the separating wall has one or a plurality of openings and is arranged between the substrate and the housing section coupled to the cooling device, and wherein the housing is provided with at least one sealable gas passage that opens into the hollow space, for evacuating and introducing gas into the hollow space; a cooling device for cooling the process box housing section coupleable to the cooling device; at least one loading / unloading unit for loading and / or unloading the process box; at least one heating unit for heating the substrate in the process box; at least one cooling unit for cooling the substrate in the process box; at least one pumping-out device for draining the hollow space of the process box; at least one gas supply device for supplying the hollow space of the process box with at least one gas; at least one transport mechanism, which is implemented for the purpose of executing a relative movement between, on the one hand, the process box and, on the other, the heating, cooling, and loading / unloading unit.

Description

technical field [0001] The present invention relates to apparatus and methods for processing coated substrates in a processing chamber. Background technique [0002] Photovoltaic layer systems for the direct conversion of sunlight into electrical energy are well known. These photovoltaic layer systems are generally referred to as “solar cells”, where the term “thin-film solar cells” refers to layer systems with small thicknesses of only a few micrometers, which require a substrate for sufficient mechanical strength. Known substrates include mineral glass, plastics (polymers) or metals, especially metal alloys, and can be designed as rigid plates or flexible films, depending on the respective layer thickness and specific material properties. [0003] Thin-film solar cells with absorbers made of compound semiconductors have proven to be advantageous in terms of process maneuverability and efficiency. Thin-film solar cells have been described several times in the patent liter...

AI Technical Summary

Problems solved by technology

For this reason, the input costs for this process step take up a not insignificant share of the total input costs of a solar plant

Furthermore, it has been shown in practice that these technically complex and comparatively expensive components suffer from significant increases due to transport of coated substrates or process boxes, heating to high maximum temperatures of more than 500° C. and due to corrosive process atmospheres. wear and may become leaky

In the event of a failure, the complete assembly line is interrupted by required maintenance work

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