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Nano hole detection system based on micro/nano hole net integrated structure and preparation method of nano hole detection system

A technology of micro-nanopore and detection system, which is applied in the direction of biochemical equipment and methods, measuring devices, enzymology/microbiology devices, etc., can solve the problems of low yield and blocked nanopores, so as to improve reliability and reduce The effect of the entropy barrier

Active Publication Date: 2015-09-09
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] At present, the production rate of nanopores is not high through the existing nanopore development methods; and nanopores have many shortcomings in sequencing applications; silicon nitride, silicon dioxide, and graphene are commonly used substrate materials for solid nanopores
Long chain polymers (DNA, RNA or peptides) tend to stay near the nanopore during the experiment, blocking the nanopore

Method used

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  • Nano hole detection system based on micro/nano hole net integrated structure and preparation method of nano hole detection system
  • Nano hole detection system based on micro/nano hole net integrated structure and preparation method of nano hole detection system
  • Nano hole detection system based on micro/nano hole net integrated structure and preparation method of nano hole detection system

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Embodiment 1

[0053] see Figure 1-3 , figure 1 A schematic diagram showing the structure of the nanopore detection system based on the micro-nano pore network integrated structure provided by the embodiment of the present invention; figure 2 A three-dimensional schematic diagram of the micro-nano pore network integrated structure provided by the embodiment of the present invention is shown. image 3 A schematic cross-sectional view of the micro-nano pore network integrated structure provided by the embodiment of the present invention is shown.

[0054] A nanopore detection system based on a micro-nano pore network integrated structure provided in this embodiment includes an electrolyte solution chamber, a micro-nano pore network integrated structure and a current detection system;

[0055] The micro-nano mesh integrated structure includes a nanoporous film and a grid layer film arranged thereon. The nanoporous film in this embodiment is a silicon nitride film 1; the grid layer film is a...

Embodiment 2

[0084] The preparation method of the micro-nano-grid-nanohole vertically integrated structure provided in this embodiment is specifically implemented according to the following steps:

[0085] The nanoporous film provided in this embodiment is a self-supporting silicon nitride film, and the self-supporting silicon nitride film is actually a silicon nitride film that does not need a substrate support. The grid layer film is silicon dioxide film.

[0086] 1) On both sides of the silicon wafer, use low-pressure chemical vapor deposition or plasma-enhanced chemical vapor deposition to grow silicon nitride films; then form a self-supporting silicon nitride film through a semiconductor process;

[0087] 2) Using focused ion beam or transmission electron microscopy to form nanopores on silicon nitride films;

[0088] 3) growing an amorphous carbon film on the nanopore;

[0089] 4) growing a silicon dioxide film on the amorphous carbon film;

[0090] 5) Making micro-nano grid struc...

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Abstract

The invention discloses a nano hole detection system based on a micro / nano hole net integrated structure. The nano hole detection system comprises an electrolyte solution chamber, the micro / nano hole net integrated structure and current detection systems, wherein the micro / nano hole net integrated structure is arranged in the electrolyte solution chamber, and comprises a nano hole layer film with nano holes and a grid layer film with micro / nano grids; and the current detection systems are arranged in an upper chamber and a lower chamber of the electrolyte solution. According to the nano hole detection system disclosed by the invention, the micro / nano grid structures and the nano holes are connected and integrated together in a penetrating manner by fully utilizing the advantages of a semiconductor integration technology; the nano hole detection system conforms to the development tendencies of miniaturization and integration of a long-chain polymer sequencing technology; a long-chain polymer is linearized, so that the long-chain polymer can stretch as far as possible before entering the nano hole; the entangled state of the long-chain polymer is unlocked; the entropy barrier of the long-chain polymer when passing through the nano holes is reduced; the phenomenon that the nano holes are blocked is avoided; and the reliability of detecting the long-chain polymer by the nano holes can be effectively improved.

Description

technical field [0001] The invention relates to the technical field of nanopore detection systems, in particular to a nanopore detection system based on a micro-nano grid-nanopore integrated structure that can be used to detect long-chain polymers (DNA, RNA or polypeptide) and a preparation method thereof. Background technique [0002] At present, the production rate of nanopores is not high through the existing nanopore development methods; and nanopores have many shortcomings in sequencing applications; silicon nitride, silicon dioxide, and graphene are commonly used substrate materials for solid nanopores . Long-chain polymers (DNA, RNA, or polypeptides) tend to stay near the nanopore during the experiment, blocking the nanopore. This is due to the fact that pure nanoporous devices have a large entropy barrier for longer chain polymer molecules. In the bulk solution, the long-chain polymers are not geometrically restricted and are in an entangled state, and the long-cha...

Claims

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Application Information

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IPC IPC(8): G01N27/00C12M1/34
Inventor 王德强王赟姣艾必燕杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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