Measuring force-controllable contact probe type displacement sensor used for micro morphology detection

Abstract

The invention discloses a measuring force-controllable contact probe type displacement sensor used for micro morphology detection, and relates to the technical field of microstructure surface quality testing. The sensor mainly comprises a measuring head module, a measuring head support module, a displacement detection module and a measuring force control module; the measuring head module consists of a probe and a probe rod, and can move with a change of a surface of a measured sample, the measuring head support module is used for providing radial support force for the measuring head module, and the displacement detection module is used for measuring displacement information of a measuring head; and the measuring force control module includes an armature, an electromagnet and a micro tension and pressure sensor, and can detect and control measuring force. By adjusting electromagnetic force to control the measuring force to be within a certain range, the measuring force-controllable contact probe type displacement sensor can guarantee good contact of the probe and the sample without damaging the sample, measurement accuracy of the contact probe type displacement sensor is improved, and the technical defect of a conventional contact probe type displacement sensor that measuring force cannot be measured and is not easy to control is completely changed.

Description

technical field [0001] The invention relates to the technical field of microstructure surface quality detection, in particular to a stylus type displacement sensor with controllable measuring force for microstructure detection. Background technique [0002] The stylus displacement sensor is the core device of the shape measurement instrument, which is widely used in the surface shape measurement, detection and characterization of industrial online and offline parts. [0003] For the stylus displacement sensor, the measurement force between the stylus and the tested sample will directly affect the detection quality of the microstructure topography. Excessive measurement force will cause a large deformation of the tip of the stylus and the surface of the sample to be measured. For the stylus, a large measurement force will cause the tip of the stylus to wear and affect the measurement accuracy, and the stylus will break when it is heavy; As far as the sample is concerned, exc...

AI Technical Summary

Problems solved by technology

The disadvantage of this method is: the measurement force is a fixed value, which cannot be changed according to the change of the sample material to be tested. The sensor can only measure samples of certain materials, which affects the range of use of the sensor.

The disadvantage of this method is that the measurement force will change with the change of the surface topography of the sample, and cannot always be kept in an appropriate range, which may cause damage to the sample in some cases

The disadvantage of this method is: by changing the voltage of the voice coil motor to adjust the relative position between the stylus and the sample to be measured, this can change the measurement force to a certain extent, but its purpose is to expand the range of the sensor rather than Actively control the measurement force, and the final measurement force is still provided by the elastic force of the elastic element, which cannot fundamentally solve the technical defects in the second method above

In addition, the magnitude of the measurement force in the above-mentioned second and third methods is unknown, and the measurement can only be judged by experience whether a certain sample can be measured without damaging it, which brings a lot of inconvenience to the measurement

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