Simulation system applicable to IC equipment workpiece positioning motion stage and modeling method of simulation system

Abstract

The invention discloses a simulation system applicable to an IC equipment workpiece positioning motion stage and a modeling method. The method comprises steps as follows: obtaining component models of base components of the motion stage, classifying the component models according to subject fields, and establishing a component-level multi-field model base; selecting component models from the component-level multi-field model base to establish a function-module-level model base; selecting models in the function-module-level model base to establish a system-level model; inspecting the system-level model, and if no error exists, setting model parameters to finish modeling of the motion stage simulation system. The system comprises the component-level multi-field model base, the function-module-level model base, the system-level model, a model compiling and simulating module and an output module. The component-level multi-field model base, the function-module-level model base and the system-level model are established in a unified MWorks modeling environment on the basis of Modelica modeling language. The modeling method is high in applicability, high in modeling efficiency and capable of effectively solving the problem of multi-field coupling.

Description

technical field [0001] The invention belongs to the technical field of simulation system modeling, and more specifically relates to a simulation system suitable for IC equipment workpiece positioning motion table and a modeling method thereof. Background technique [0002] IC equipment workpiece positioning motion table is an ultra-precision mechanical structure, which is mainly supported and guided by gas bearings, directly driven by linear motors, and has the characteristics of no mechanical contact in structure, and can realize precise positioning motion with micro resistance within the stroke range . The IC equipment workpiece positioning motion table involves many disciplines such as machinery, air pressure, electromagnetic, electric control, etc. The dynamic characteristics of the entire motion table are the result of the interaction of multiple fields. [0003] At present, in the design and research process of the workpiece positioning motion table for IC equipment, ...

AI Technical Summary

Problems solved by technology

When carrying out modeling and simulation of a single subject field or component level, only focus on the details of the subject field or the component itself, ignoring the interactive coupling factors between the components, which makes the established motion table model unable to accurately reflect the complete The behavior characteristics of the system, and the role and significance of modeling and simulation methods in the design and research of motion platforms cannot be brought into play

In addition, although some co-simulation methods based on multiple modeling software interfaces have achieved common solution calculations between a few disciplines or components in the IC equipment workpiece positioning motion table, they are limited by the software interface functions and modeling The simulation operation process has very high requirements for developers, so it is not conducive for users to master and use it well.

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