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Vacuum extraction equipment

A kind of vacuum equipment, low vacuum technology, applied in the direction of mechanical equipment, liquid variable capacity machinery, pump control, etc., can solve the problems of unguaranteed yield, reduced system sealing, system air leakage, etc., to achieve the benefit of grinding and polishing Cleaning and cleaning, unimpeded gas flow, and improved safety performance

Active Publication Date: 2015-08-12
CHANGZHI CITY HUAJIE GUANG TECH CO LTD
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Problems solved by technology

[0002] With the high development of modern science and technology, the sealed containers used in industry, commerce, science and research institutions are getting bigger and bigger. Since the manufacturing process cannot be perfect and there are thousands of sealing points, the sealing device may inevitably leak. , in the process of production and development, the equipment often has problems in material quality, installation, component fatigue and structural design, which reduces the sealing of the system, causes air leakage in the system, causes the workpiece to be oxidized and scrapped, and affects industrial production. At the same time, traditional equipment The accuracy is low and the yield cannot be guaranteed

Method used

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  • Vacuum extraction equipment

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Embodiment Construction

[0024] Such as figure 1 As shown, the vacuum equipment of the present invention includes a vacuum chamber 1, a process system 2, a vacuum breaking system 3, a low vacuum system 4 and a high vacuum system 5, and the low vacuum system 4 includes a first low vacuum pump 41 and a low vacuum pump 41. meter 42, the first low-vacuum pump 41 and the low-vacuum gauge 42 are connected to the vacuum chamber 1 through pipelines, and a first electromagnetic valve 43 is arranged between the first low-vacuum pump 41 and the vacuum chamber 1, A first isolation valve 44 is provided between the low vacuum gauge 42 and the vacuum chamber 1;

[0025] The high vacuum system 5 includes a high vacuum pump 51 and a high vacuum gauge 52, the high vacuum pump 51 and the high vacuum gauge 52 are all connected to the vacuum chamber 1 through pipelines, and the high vacuum pump 51 is connected to the vacuum chamber 1 A second solenoid valve 53 is arranged between them, a second isolation valve 54 is arra...

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Abstract

The invention, which belongs to the technical field of the vacuum extraction equipment, provides a piece of vacuum extraction equipment. According to the technical scheme, the structural design of the vacuum system is improved based on the working practice. A filter valve is added and is used for reducing the influence on the high-pressure vacuum pumping unit by internal residues of the gas; and a low vacuum gauge and a high vacuum gauge are arranged to carry out precise measurement for the inside of the system, so that the equipment controlling becomes precise. Meanwhile, with a multi-valve series connection way, air intake stability can be guaranteed; and on the basis of a proper sealing way, the sealing performance of the high vacuum system is improved, thereby reducing the air leakage rate of the system and enhancing the safety of the equipment. The vacuum extraction equipment comprises a vacuum cavity, a process system, a vacuum breaking system, a low vacuum system, and a high vacuum system; and all systems are connected with the vacuum cavity. The working processes of low vacuum extraction, high vacuum extraction, process air intake, and vacuum breaking are realized. The vacuum extraction equipment can be applied to the vacuum extraction equipment technical field widely.

Description

technical field [0001] The vacuum equipment of the invention belongs to the technical field of vacuum equipment. Background technique [0002] With the high development of modern science and technology, the sealed containers used in industry, commerce, science and research institutions are getting bigger and bigger. Since the manufacturing process cannot be perfect, there are thousands of sealing points, and the sealing device inevitably has the possibility of leakage. , in the process of production and development, the equipment often has problems in material quality, installation, component fatigue and structural design, which reduces the sealing of the system, causes air leakage in the system, causes the workpiece to be oxidized and scrapped, and affects industrial production. At the same time, traditional equipment The accuracy is low and the yield cannot be guaranteed. Contents of the invention [0003] The present invention overcomes the deficiencies in the prior ar...

Claims

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Application Information

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IPC IPC(8): F04B37/14F04B49/22F04B53/16F04B51/00F04B53/00
Inventor 袁建清
Owner CHANGZHI CITY HUAJIE GUANG TECH CO LTD
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