A method for measuring the non-orthogonality of the guide rail of a long-distance motor

A non-orthogonal, long-distance motor technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems that the code ruler and the guide rail cannot guarantee absolute parallelism, follow the change, and the accuracy is limited.

Active Publication Date: 2018-01-19
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] 1. The precision is limited, the precision of the mechanical installation guide rail can only reach the level of 100 microradians, and the code ruler and the guide rail cannot be guaranteed to be absolutely parallel;
[0011] 2. The external tooling is used as the reference, and the interferometer coordinate system is not used as the reference
When the interferometer is affected by environmental factors such as temperature and pressure, the code ruler cannot respond in time and follow the changes;
[0012] 3. Manual measurement is time-consuming and inconvenient

Method used

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  • A method for measuring the non-orthogonality of the guide rail of a long-distance motor
  • A method for measuring the non-orthogonality of the guide rail of a long-distance motor
  • A method for measuring the non-orthogonality of the guide rail of a long-distance motor

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Experimental program
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Effect test

Embodiment 1

[0075] When the positioning platform has two sets of measurement systems: an interferometer and a code ruler, embodiment 1 illustrates how to use the interferometer as a reference to measure the deviation between the code ruler coordinate system and the interferometer coordinate system, namely figure 1 kx and ky, and the scale coefficients sx (X direction) and sy (Y direction) of the code ruler relative to the interferometer.

[0076] Such as image 3 As shown, it is a schematic diagram of the control loop of the positioning platform. In the figure, the set point generator, PID control module, actuator, mechanical structure, and measurement system switching controller are connected in sequence, and then different measurement systems are selected to participate in servo control according to needs. Connect the interferometer measurement system and the code ruler measurement system respectively, and finally add a calculation module after the output of the measurement system to co...

Embodiment 2

[0118] In embodiment 1, it is described that when the positioning platform has both an interferometer and a code ruler, and in embodiment 2, when the measuring system of the positioning platform has no interferometer but only a code ruler, the standard measuring tool will be used as a reference , to realize the guide rail calibration of the long-distance motor. In this embodiment, the positioning platform is a workpiece platform, and the standard measuring tool adopts alignment marks on a reference plate, and the reference plate is relatively fixed to the workpiece platform.

[0119] Specific steps are as follows:

[0120] Step 1: If Image 6 As shown, at first, at least one row of X-direction alignment marks and one column of Y-direction alignment marks are arranged on the positioning table reference plate, wherein the spacing between the marks is preset, that is to say, the nominal position of the marks (Xx mark ,Xy mark ), (Yx mark ,Yy mark ) is known.

[0121] Step 2...

Embodiment 3

[0137] Embodiment 3 is to describe that when the positioning stage has only one direction (assumed to be Y direction) long-distance motor (without interferometer measurement system), such as a mask stage, then it only needs to move on the reticle or mask stage along its moving direction It is sufficient to process a row of marks on the reference plate, and the marks are relatively fixed to the mask table. Similarly, this row of marks is the standard measuring tool, which is used as a reference to realize the guide rail calibration of the long-distance motor, such as Figure 7 shown.

[0138] Specific steps are as follows:

[0139] Step 1: first arrange at least one row of Y-direction alignment marks on the reticle or the mask table reference plate, wherein the spacing between the marks is preset, that is to say, the nominal positions of the marks (Yx mark ,Yy mark ) is known.

[0140] Step 2: Set the degrees of freedom other than X and Y to zero. Through the measurement of...

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Abstract

The invention provides a method for measuring the non-orthogonality of a guide rail of a long-distance motor. By measuring the non-orthogonality of the installation of the guide rail, the method is easy to operate, simple and convenient; taking the coordinate system of the interferometer as the benchmark, the coordinate system of the encoder ruler is measured relative to the coordinate system of the interferometer. The gain and non-orthogonality of the interferometer are improved, and the measurement accuracy is improved; when the non-orthogonal and gain of the interferometer coordinate system relative to the ideal coordinate system changes, the code ruler coordinate system can also change in real time.

Description

technical field [0001] The invention relates to the technical field of image sensors, in particular to a method for measuring the non-orthogonality of long-distance motor guide rails. Background technique [0002] The workpiece table in the lithography machine field is a high-precision positioning motion table (hereinafter referred to as the positioning table), and the servo accuracy is generally at the nanometer level, which requires high-precision controllers, actuators, and measurement systems. The measurement system commonly used at present is an interferometer, but the interferometer is a relative measurement system, and its initial position will change after the positioning platform is powered on again. Therefore, another absolute measurement system (usually a code ruler) is needed to determine the initial position of the positioning platform for the interferometer. [0003] In this way, the positioning platform has two sets of measurement systems, and each measuremen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00G01B11/26
Inventor 唐彩红
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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