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Device and method for preparing waveguide and grating by femtosecond laser etching

A waveguide grating, femtosecond laser technology, applied in diffraction grating, optical mechanical equipment, photoengraving process of pattern surface, etc., can solve the problems of complex processing, difficulty in ensuring the high parallelism of LPWG waveguide, time-consuming process, etc., to achieve simplification The effect of the device

Inactive Publication Date: 2015-07-15
SOUTHWEAT UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, ion exchange technology is mostly used in the preparation of long-period waveguide grating devices, which is complex and time-consuming, and it is difficult to ensure the high parallelism of LPWG waveguides.

Method used

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  • Device and method for preparing waveguide and grating by femtosecond laser etching
  • Device and method for preparing waveguide and grating by femtosecond laser etching
  • Device and method for preparing waveguide and grating by femtosecond laser etching

Examples

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Effect test

Embodiment 1

[0013] exist figure 1 In this embodiment, the femtosecond laser preparation long-period waveguide grating processing device consists of a femtosecond laser 1, an optical polarizer 2, a beam splitter 3, a first reflector 4, a second reflector 5, a third reflector 6, a display Micro-objective lens 7, lithium niobate crystal 8, precision rotating platform 9, three-dimensional electric translation platform 10, optical power meter 11 and computer 12 are connected in sequence.

[0014] The femtosecond laser 1 generates a laser with a repetition frequency of 76 MHz and a pulse width of 50 femtoseconds. After passing through the microscope objective lens 7, the laser is focused on the crystal with a depth of 400 μm. The three-dimensional electric translation stage 10 is fixed on it at a speed of about 5 mm / s. Lithium niobate crystal 8 moves on the surface, and the writing of the first optical waveguide 15 is completed. After that, the average laser power was changed to 350 milliwatts...

Embodiment 2

[0017] exist figure 1 In this embodiment, the femtosecond laser preparation long-period waveguide grating processing device consists of a femtosecond laser 1, an optical polarizer 2, a beam splitter 3, a first reflector 4, a second reflector 5, a third reflector 6, a display Micro-objective lens 7, lithium niobate crystal 8, precision rotating platform 9, three-dimensional electric translation platform 10, optical power meter 11 and computer 12 are connected in sequence.

[0018] The output laser of the femtosecond laser is a laser with a repetition frequency of 76 MHz and a pulse width of 50 femtoseconds. After passing through the microscope objective lens 7, the laser is focused on the lithium niobate crystal at a depth of 400 μm. The movement of the lithium niobate crystal 8 fixed thereon completes the writing of the second optical waveguide 18, wherein the two waveguides are on the same horizontal plane and are strictly parallel. Afterwards, the average laser power was ch...

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Abstract

The invention discloses a device and a method for preparing a waveguide and a grating by femtosecond laser etching. The device is formed by sequentially connecting a femtosecond laser, an optical polarizer, a beam splitter, a first reflector, a second reflector, a third reflector, a microobjective, lithium niobate crystals, a precision rotating platform, a three-dimensional electrical translation stage, an optical power meter and a computer. The device and the method solve the problem of how to control the laser condition and achieve an effect of using one femtosecond laser light source and only one set of processing equipment for simultaneously implementing preparation of the optical waveguide and the grating.

Description

technical field [0001] The invention belongs to the technical field of laser micromachining, and relates to a preparation device and method for femtosecond laser etching waveguide gratings. Background technique [0002] The long-period waveguide grating has a long-period grating structure (a grating with a period of tens to hundreds of microns). According to the mode coupling theory, LPWG can couple the guided mode energy transmitted from the optical waveguide to the lithium niobate substrate, resulting in a wavelength-dependent Correlated transmission loss, showing very good band-stop filtering characteristics. Its working principle is that light of a certain wavelength range is input into the input waveguide of the LPWG. Due to the effect of the long-period grating perpendicular to the waveguide, only the light of the resonant wavelength that satisfies the phase matching condition can pass through the guided mode and the lithium niobate substrate. The optical energy of th...

Claims

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Application Information

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IPC IPC(8): G02B5/18G03F7/00
CPCG02B5/1857G03F7/2006
Inventor 周自刚范宗学杨永佳冯杰单常亮魏欣芮吴琴林鹏
Owner SOUTHWEAT UNIV OF SCI & TECH
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