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Copying and splicing method of large-size plane diffraction grating

A diffraction grating and large-scale technology, which is applied in the field of replication and splicing of large-scale plane diffraction gratings, can solve the problems of high stability requirements of brackets, drift errors of adjustment and locking systems, etc., and achieves the effects of low cost, reduced difficulty and easy realization.

Active Publication Date: 2015-07-01
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0007] In order to solve the problems that the existing grating splicing method requires repeated and continuous use of high-precision control and adjustment technology, high requirements on the stability of the bracket, and drift errors between the adjustment and locking systems when the exposure method is used, the present invention provides a large-size Copy and stitching method of planar diffraction grating

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  • Copying and splicing method of large-size plane diffraction grating
  • Copying and splicing method of large-size plane diffraction grating
  • Copying and splicing method of large-size plane diffraction grating

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specific Embodiment approach 1

[0017] Specific implementation mode 1. Combination Figure 1 to Figure 3 To illustrate this embodiment, the copying and splicing method of a large-size plane diffraction grating includes steps,

[0018] S1. Using a piece of grating master 2, time-sharing copy twice in the adjacent area of ​​the grating blank 3;

[0019] S2. Duplicate the first grating in the left area of ​​the grating blank 3, and use epoxy resin glue as an adhesive in the duplication of the first grating. After the epoxy glue is cured, separate the first grating duplication The grating blank 3 and the grating master 2, so as to form a first replica grating 4 in the left area of ​​the grating blank 3;

[0020] S3. Duplicate the second grating in the right area adjacent to the left area of ​​the grating blank 3, detect the splicing error existing in the second grating duplication and the first duplicated grating during the duplication of the second grating, and adjust the splicing error and after the epoxy re...

specific Embodiment approach 2

[0026] Specific embodiment two, combine Figure 1 to Figure 3 This implementation mode is described. This implementation mode is an example of the method for copying and splicing a large-size plane diffraction grating described in the first specific implementation mode, including the following steps:

[0027] 1. First place the grating blank 3 on the vibration isolation platform 1, and then use a piece of grating master 2 to copy twice in the adjacent area of ​​the grating blank 3 in time-sharing. When copying, the grating blank 3 is below, and the raster master 2 on top;

[0028] 2. Duplicate the first grating in the left area of ​​the grating blank 3, and use epoxy resin glue as an adhesive in the first grating duplication. After the epoxy resin glue is cured, separate the first grating duplication The grating blank 3 and the grating master 2, so as to form a first replica grating 4 in the left area of ​​the grating blank 3;

[0029] 3. Copy the second grating in the right...

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Abstract

The invention discloses a copying and splicing method of a large-size plane diffraction grating, relates to the technical field of diffraction grating manufacturing and solves the problem that an existing grating splicing method needs to repeatedly and continuously adopt high-accuracy control adjusting technology and is high in requirement on stability of a support and the problem of drift error existing between an adjusting system and a locking system when an exposure method is adopted. The copying and splicing method includes: utilizing a grating mother set to copy in an area adjacent to a grating blank for two times at different time moments; copying a first grating in a left-side area of the grating blank; copying a second grating in a right-side area adjacent to the left-side area of the grating blank; detecting splicing errors of the second copying grating and the first copying grating by a splicing error detection system; detecting two-dimensional splicing errors by an error detection system when the second copying grating is spliced. When the grating is in use, a multi-dimensional mechanical adjusting frame is not needed to adjust posture of the grating in realtime, and the grating can be stored for a long time; only two-dimensional splicing errors need to be detected in the process of splicing, so that difficulty in detection and adjustment is lowered.

Description

technical field [0001] The invention relates to the technical field of diffraction grating production, in particular to a method for duplicating and splicing large-scale plane diffraction gratings. Background technique [0002] Large-size planar diffraction gratings are important optical components used in astronomical spectrum analysis, laser inertial confinement fusion and other fields. Using them can effectively improve the resolution and signal-to-noise ratio of astronomical telescope systems, and can improve the performance of laser inertial confinement fusion systems. Laser output energy and power. [0003] Two methods are generally used to manufacture large-scale planar diffraction gratings: mechanical scribing and holographic exposure ion beam etching. Among them, the mechanical scribing method, to produce large-area gratings, has extremely high requirements on the operating accuracy of the grating scribing machine and changes in external environmental conditions, a...

Claims

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Application Information

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IPC IPC(8): G02B5/18
CPCG02B5/1847
Inventor 张善文卢禹先齐向东李晓天于海利于宏柱巴音贺希格唐玉国吉日嘎兰图
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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