Micro-scanning platform, shooting method and work area flatness calibration method

Abstract

The invention discloses a micro-scanning platform, a shooting method and a work area flatness calibration method. Continuous scanning on a low precision platform can be achieved. The method mainly comprises the steps that a scanning coordinate system is set up in a work area; through a plane formula A1X+B1Y+C1Z+D1=0 and a standard slide, the calibration values En of the flatnesses of all scanning points in the work area of an objective table are determined; then, in actual sample slide shooting, the actual focusing position of each scanning point is determined according to the corresponding En. In this way, all scanning points can be adjusted to be in place before a camera shoots all the scanning points. The continuous scanning on the low precision platform can be achieved. Moreover, the scanning precision is high, scanning efficiency is high, and shot photos are clear. Due to the fact that high-precision continuous scanning is achieved on the low precision platform, the manufacturing cost of a high-precision scanning device is remarkably reduced.

Description

technical field [0001] The invention relates to the field of continuous scanning of microscopes, in particular to a microscopic scanning platform, a photographing method and a method for calibrating the flatness of a working area. Background technique [0002] Microscope is a common tool for observing the microscopic world, and is currently widely used in biomedical diagnostic research and industrial production. At present, automatic microscopes are more and more widely used, that is, the movement of the slide on the stage, the focus between the lens and the sample, and the shooting of the sample image are all driven by the automated XY-axis stage, Z-axis lens drive and digital microscope. Camera linkage is complete. [0003] Usually, samples for microscope observation are placed on a glass slide (25mm x 75mm), placed on the working area of ​​the stage, and then illuminated by transmitted light (mostly biological samples) or placed directly on the stage for illumination by ...

AI Technical Summary

Problems solved by technology

However, due to travel range, assembly and other factors, the height difference (flatness) of the entire movement is about 2um, which has exceeded the focal plane depth of field of the lens, and some areas will be out of focus during continuous scanning

If you use a stage with higher precision guide rails, the cost will rise linearly, and the hardware complexity will also increase (such as using air bearing or magnetic levitation guide rails)

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