Chassis assembly for polycrystalline silicon reduction furnace

Abstract

The invention discloses a chassis assembly for a polycrystalline silicon reduction furnace. The chassis assembly for the polycrystalline silicon reduction furnace comprises a chassis body, a plurality of electrode holders, a plurality of air inlet pipes and a plurality of air exhaust pipes, wherein six spiral flow passages, which are spiraled from the center of the chassis body to the outer peripheral edge of the chassis body, are defined in the chassis body, coolant inlets and at least six coolant outlets, which are communicated with the six spiral flow passages, are formed in the chassis body, and the coolant inlets are located at the center of the chassis body; the electrode holders are arranged on the chassis body; the air inlet pipes and the air exhaust pipes are arranged on the chassis body. The chassis assembly for the polycrystalline silicon reduction furnace, disclosed by the embodiments of the invention, has the advantages that the coolant flow resistance is low, the cooling effect is good, the radial temperature distribution is uniform, temperature difference stress and deformation are difficultly generated, and the like.

Description

technical field [0001] The invention relates to the technical field of polysilicon production, in particular to a chassis assembly for a polysilicon reduction furnace. Background technique [0002] The polysilicon reduction furnace is the core equipment for producing the final product in the production of polysilicon, and it is also the key link that determines the system capacity and energy consumption. Small polysilicon reduction furnaces (such as 12 pairs of rods, 18 pairs of rods, etc.) generally consume high energy consumption per unit weight of products, and the output of a single furnace is relatively low, which has become less and less suitable for the current market requirements. With the improvement of polysilicon equipment level With continuous development and improvement, large-scale reduction furnaces have been continuously developed, and 36 pairs of rods, 48 ​​pairs of rods and even 60 pairs of rods have appeared. [0003] Although the large-scale polysilicon ...

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Problems solved by technology

[0003] Although the large-scale polysilicon reduction furnace in the related art solves some problems of output and energy consumption, along with the enlargement and complexity of the equipment, the flow resistance of the coolant in the chassis increases, resulting in poor cooling effect, and due to The flow of coolant is long, and the radial temperature distribution of the chassis is uneven, resulting in temperature difference stress and deformation of the chassis

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