A real-time test and analysis system for thin film electrical characteristics and breakdown characteristics

Abstract

The invention relates to a real-time test and analysis system for electrical properties and breakdown properties of thin films, which includes an electrical test device, a real-time microscopic image acquisition device and a comprehensive analysis and processing device, wherein the electrical test device includes a sample clamping seat, a test probe , a digital source meter and a test control module, the test probe is arranged on the sample clamping seat, and the test probe, the digital source meter and the test control module are connected in sequence; the microscopic image real-time acquisition device includes a connected A data code optical microscope module and an image acquisition module, the data code optical microscope module is arranged on the sample clamping seat; the comprehensive analysis and processing device is respectively connected to the test control module and the image acquisition module. Compared with the prior art, the present invention has the advantages of easy operation, less time-consuming, good intuitiveness, etc., and can effectively analyze and evaluate the breakdown mechanism of the thin film material and the cause of the breakdown phenomenon.

Description

technical field [0001] The invention relates to a performance testing technology of an insulating medium or a semiconductor thin film in the field of material science, in particular to a real-time testing and analysis system for the electrical characteristics and breakdown characteristics of a thin film. Background technique [0002] Breakdown testing is an important part of thin film semiconductor device or thin film capacitor research. However, the breakdown behavior of thin films under strong fields is extremely complex, and it is difficult to generalize. How to simply and effectively evaluate and analyze the breakdown phenomenon of thin films under strong field is an important research method to improve the research efficiency of thin film materials. Testing and analyzing the breakdown behavior of samples is a necessary means to improve its electrical resistance and reliability. [0003] For the breakdown behavior test research, the conventional method is to conduct br...

AI Technical Summary

Problems solved by technology

This consumes a lot of time and material resources, and the research efficiency is low

At the same time, because the traditional breakdown test method is the result of statistical analysis of a large number of samples, but does not study the breakdown process, it is difficult to analyze and evaluate the breakdown mechanism of thin film materials and the reasons for the breakdown phenomenon. Very unfavorable to the research and design of thin film materials and devices

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