Real-time testing and analysis system for electrical characteristics and breakdown characteristics of thin films

Abstract

The invention relates to a real-time testing and analysis system for electrical characteristics and breakdown characteristics of thin films, which comprises an electrical testing unit, a real-time microscopic image acquisition unit and a comprehensive analysis and processing unit, wherein the electrical testing unit comprises a sample-clamping base, testing probes, a digital source meter and a testing control module; the testing probes are arranged on the sample-clamping base, and the testing probes, the digital source meter and the testing control module are connected sequentially; the real-time microscopic image acquisition unit comprises a data code optical microscopy module and an image acquisition module which are connected with each other, and the data code optical microscopy module is arranged on the sample-clamping base; the comprehensive analysis and processing unit is respectively connected with the testing control module and the image acquisition module. Compared with the prior art, the real-time testing and analysis system for electrical characteristics and breakdown characteristics of thin films has the advantages of easiness in operation, little consumed time, high intuition and the like, and can effectively analyze and evaluate the breakdown mechanism of thin film materials and the cause of the breakdown phenomenon.

Description

technical field [0001] The invention relates to a performance testing technology of an insulating medium or a semiconductor thin film in the field of material science, in particular to a real-time testing and analysis system for the electrical characteristics and breakdown characteristics of a thin film. Background technique [0002] Breakdown testing is an important part of thin film semiconductor device or thin film capacitor research. However, the breakdown behavior of thin films under strong fields is extremely complex, and it is difficult to generalize. How to simply and effectively evaluate and analyze the breakdown phenomenon of thin films under strong field is an important research method to improve the research efficiency of thin film materials. Testing and analyzing the breakdown behavior of samples is a necessary means to improve its electrical resistance and reliability. [0003] For the breakdown behavior test research, the conventional method is to conduct br...

AI Technical Summary

Problems solved by technology

This consumes a lot of time and material resources, and the research efficiency is low

At the same time, because the traditional breakdown test method is the result of statistical analysis of a large number of samples, but does not study the breakdown process, it is difficult to analyze and evaluate the breakdown mechanism of thin film materials and the reasons for the breakdown phenomenon. Very unfavorable to the research and design of thin film materials and devices

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