Two-dimensional plane displacement sensor

Abstract

The invention discloses a two-dimensional plane displacement sensor. The two-dimensional plane displacement sensor consists of two parts of a definite matrix surface and an indefinite matrix surface, which are oppositely arranged in parallel, wherein single-layer or multi-layer exciting winding matrixes which are connected in series and exactly the same are arranged on a base body of the definite matrix surface by the definite matrix surface, each layer of the exciting winding matrixes is constituted by a plurality of the same exciting winding matrix units arranged in the X direction and in the Y direction, and the exciting winding matrix units are successively connected in series in the Z direction; the indefinite matrix surface consists of a base body of the indefinite matrix surface and induction coils arranged on the surface of the base body of the indefinite matrix surface, and the induction coils are arranged by three induction coils with the same size and the same number of turns in the shape of L. According to the two-dimensional plane displacement sensor disclosed by the invention, a magnetic field containing a time quantity and a space quantity is established on the surface of the indefinite matrix surface, the single indefinite matrix surface is adopted to translate magnetic signals at different positions of the definite matrix surface into electrical signals through an electromagnetic induction principle, operation processing is performed on the electrical signals generated by the three induction coils, so that a two-dimensional plane displacement quantity can be obtained, and the two-dimensional plane displacement sensor has the characteristics of simple structure, low cost, good oil pollution and dust resistant capacity and good shock vibration resistant capacity.

Description

technical field [0001] The invention belongs to the field of linear displacement precision measurement. Background technique [0002] Existing sensors that can measure plane two-dimensional displacement are divided into two types. One is to install two linear sensors vertically on the measurement plane to obtain displacements in two dimensions respectively, and the other is to use a single sensor to simultaneously obtain plane displacement. The amount of displacement in two dimensions. Installing two linear sensors vertically will bring Abbe errors to the measurement system, and the positioning accuracy of the clamping will have a great influence on the measurement results. At the same time, it occupies a large space, which is not conducive to small space measurement. Existing planar two-dimensional displacement sensors include two-dimensional gratings and two-dimensional capacitive gratings. The measurement accuracy of two-dimensional gratings depends on the manufacturing ...

AI Technical Summary

Problems solved by technology

Installing two linear sensors vertically will bring Abbe error to the measurement system, and the positioning accuracy of the clamping will have a great influence on the measurement results, and at the same time occupy a large space, which is not conducive to small space measurement

Existing planar two-dimensional displacement sensors include two-dimensional gratings and two-dimensional capacitive gratings. The measurement accuracy of two-dimensional gratings depends on the manufacturing accuracy of binary optical devices, and the complex optical path design and manufacturing process make the cost higher

At the same time, the two-dimensional grating has poor resistance to oil, dust and shock vibration

The measurement range of the two-dimensional capacitive grid is small, and because the dielectric constant of the capacitor is easily affected by the temperature, humidity, oil and dust in the external environment, the sensor's protection ability is poor

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