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Energy-saving flexible transparent conductive film and preparation method thereof

A transparent conductive film, energy-saving technology, applied in chemical instruments and methods, ion implantation plating, coating, etc., can solve problems such as increasing energy consumption, and achieve the advantages of reducing energy consumption, high sensitivity, and reducing high-temperature annealing processes. Effect

Active Publication Date: 2017-12-19
高邮市汇金新材料科技有限公司
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

Although this method improves the optical and electrical properties of the conductive film, it increases energy consumption and requires higher temperature resistance of the base material to ensure that the base material is not deformed or deformed in a small amount during high temperature annealing

Method used

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  • Energy-saving flexible transparent conductive film and preparation method thereof
  • Energy-saving flexible transparent conductive film and preparation method thereof

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Embodiment Construction

[0031] see figure 2 Shown is a device for preparing energy-saving flexible transparent conductive films, which includes a chamber with an unwinding chamber C1, a coating chamber C2 and a winding chamber C3, and an unwinding roller A1 and glow discharge ion surface treatment are arranged in the unwinding chamber Machine GD, the winding roll A2 is set in the winding cavity, and the cooling roll B1 is set in the coating cavity. A vacuum holding valve device E1 is provided on the cavity wall between the unwinding cavity and the coating cavity, and on the cavity wall between the winding cavity and the coating cavity. The unwinding chamber, the coating chamber and the winding chamber all have a vacuum pump for evacuating and an inflating tube for filling inert gas.

[0032] The first, second, third, fourth, fifth, and sixth magnetron sputtering devices (target machines) D1, D2, D3, D4, D5, and D6 are set around the cooling roller; the flexible transparent substrate is cooled after...

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Abstract

The invention provides a method for preparing an energy-saving flexible transparent conductive film, which does not require high-temperature annealing after forming the film and reduces energy consumption; the crystallization degree of the film reaches 80%, and is suitable for large-scale and industrialized production. The method uses a plurality of magnetron sputtering devices in a vacuum coating chamber, and each magnetron sputtering device includes a sputtering chamber with an inert gas as a working gas and oxygen as a reactive gas, and a target located in the sputtering chamber. , the continuously moving flexible transparent substrate passes through the sputtering chamber of each target machine in turn, the temperature of the flexible transparent substrate is <80°C, and the target or target is oxidized by controlling the flow of oxygen and inert gas into each sputtering chamber The material is deposited on a flexible transparent substrate at one time. The present invention also provides an energy-saving flexible transparent conductive film with high light transmittance, low resistivity and low chromaticity value, which includes a flexible transparent substrate and SiO2 layer, Nb2O5 layer, Nb2Ox layer deposited on the flexible transparent substrate in sequence layer (x=4.5‑4.98), SiO2 layer, silver layer or copper layer, semiconductor oxide layer.

Description

technical field [0001] The technology of the invention relates to an energy-saving flexible transparent conductive film and a preparation method thereof. The flexible transparent conductive film is widely used in the manufacture of flexible display devices, flexible smart touch screens, and flexible thin-film solar cells. Background technique [0002] Flexible transparent conductive films are widely used in flexible displays, thin-film solar cells, smart window films, touch screens and other fields due to their unique characteristics of flexibility, lightness, and high transmittance. [0003] At present, tin-doped indium oxide (ITO) is used as a transparent conductive thin film material, and it is widely used because of its mature manufacturing and application technology. However, due to its characteristic requirements, its optimum film-forming temperature is around 300°C. However, for flexible, ultra-thin transparent substrate materials (such as PET), the substrate materia...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35B32B15/04B32B9/04
Inventor 王鲁南王建华窦立峰朴賸一全武贤朱丽萍叶志镇
Owner 高邮市汇金新材料科技有限公司
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