Graphite boat trolley convenient for loading and unloading sheet

Abstract

The invention relates to a graphite boat trolley convenient for loading and unloading sheet. The graphite boat trolley convenient for loading and unloading sheet comprises a trolley framework, a graphite boat bearing board, a rotary inclined mechanism and a locking piece; before loading / unloading the sheet for the graphite boat, external force is offered to the graphite boat bearing board, the graphite boat bearing board can rotate / incline for the preset angle and the graphite boat bearing board is fixed via the locking piece. By adopting the rotary inclined mechanism, the graphite boat bearing board can rotate / incline for the preset angle, and the operator can load and unload the battery sheet conveniently, the working strength can be reduced for the workers and the sheet loading and unloading time is reduced, the work efficiency is raised. In addition, a pneumatic spring or a hydraulic pressure buffer is arranged on the rotary inclined mechanism, the rotary and inclining process of the graphite boat is stable for avoiding fragments while the position of the graphite boat is adjusted in horizontal direction and vertical direction; the graphite boat trolley convenient for loading and unloading sheet is flexible in structure, safe and reliable in use, convenient to operate and use.

Description

technical field [0001] The invention belongs to the field of semiconductor integrated circuit manufacturing equipment, and more specifically relates to a graphite boat trolley which is convenient for loading and unloading sheets. Background technique [0002] During the manufacturing process of solar cells, many processes involve loading and unloading cells. The graphite boat trolley is the most commonly used tooling device in the plasma-enhanced chemical vapor deposition (PECVD) process of solar cell manufacturing. Between the table and the cooling cabinet. [0003] Among them, the function of the four-tube horizontal plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition, PECVD) equipment is to use high-frequency electric field excitation in the high-vacuum quartz chamber to decompose process gases SiH4 and NH3, and deposit on the surface of the sample to form Si3N4 film. In the four-tube horizontal PECVD, the graphite boat trolley is the k...

AI Technical Summary

Problems solved by technology

[0007] However, the PECVD trolley disclosed in the above-mentioned patent provides convenience for the operator to load and unload wafers to a certain extent because the table can be tilted up and down at an angle of 45°, but the function is relatively single. In the actual process of loading silicon wafers, the operator It is still necessary to move the position around the worktable 180 degrees to load the film, resulting in high work intensity, long time consumption and low work efficiency for the operator

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