Electromagnetically driven two-dimensional scanning micromirrors for laser scanning display
An electromagnetic drive, laser scanning technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, microstructure devices composed of deformable elements, optics, etc. , mirror distortion, etc.
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[0025] The specific embodiments of the present invention will be described in further detail below in conjunction with the drawings and embodiments. The following examples are used to illustrate the present invention, but not to limit the scope of the present invention.
[0026] See Figure 1 to Figure 6 , An electromagnetically driven two-dimensional scanning micromirror 100 for laser scanning display (hereinafter referred to as a micromirror) according to a preferred embodiment of the present invention includes a peripheral frame 1, an inner frame 2 arranged in the peripheral frame 1, and a connection The vertical scanning torsion beams 3 of the outer frame 1 and the inner frame 2, the micro mirror 4 and a pair of magnets 5 arranged in the inner frame 2. The peripheral frame 1 has a frame 11, a cavity 12 surrounded by the frame 11, and a cantilever 13 straddling the cavity 12. The inner frame 2 is connected to the peripheral frame 1 through a vertical scanning torsion beam 3 ...
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