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Relative diffraction efficiency tester for Fourier transformation plane grating

A Fourier transform and plane grating technology, applied in the field of spectroscopy, can solve the problem of inconsistent bandwidth of the outgoing spectrum, and achieve the effect of small measurement result bandwidth, low impact and high positioning accuracy

Active Publication Date: 2015-04-08
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0008] The purpose of the present invention is to propose a relative diffraction efficiency tester for a Fourier transform plane grating, which solves the problem of inconsistency in the bandwidth of the outgoing spectrum in the prior art, improves measurement accuracy, simplifies operation steps, and improves measurement efficiency

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  • Relative diffraction efficiency tester for Fourier transformation plane grating
  • Relative diffraction efficiency tester for Fourier transformation plane grating

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Embodiment Construction

[0027] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0028] See attached figure 2 , a Fourier transform plane grating relative diffraction efficiency tester of the present invention comprises a light source module, a measuring monochromator, a moving mirror system 36, a control system, and a Fourier transformer arranged inside a Fourier spectrum measuring system housing 38. Spectral measurement system and reference interferometry system;

[0029] The measuring monochromator comprises a measuring monochromator housing 25, an incident aperture 20 and an exit aperture 24 arranged on the measuring monochromator housing 25, and an optional diaphragm 21 arranged in the measuring monochromator housing 25 , concave collimating mirror C22, turntable 13 and concave imaging mirror 23;

[0030] The Fourier spectrum measurement system includes an off-axis collimating mirror 26, a spectroscopic cube A27, a fixed pyra...

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Abstract

The invention discloses a relative diffraction efficiency tester for a Fourier transformation plane grating, belongs to the technical field of spectrums and aims to solve the problem of inconsistency of emergent spectrum bandwidth in the prior art. The relative diffraction efficiency tester has the advantages of improving the measurement precision, simplifying the operation steps and improving the measurement efficiency. According to the relative diffraction efficiency tester disclosed by the invention, light emitted by a light source module illuminates a concave collimating mirror C by sequentially passing through an incident hole and a selective aperture slot, subsequently illuminates a reference plane reflecting mirror or a to-be-tested grating on a rotary table, and then converges in an emergent hole by a concave plane imaging mirror; emergent light from the emergent hole is collimated by an off-axis collimation mirror, split by a beam-splitting cuboid A, reflected by a fixed pyramid A and a moving pyramid A and then gathers in a main detector by an off-axis imaging mirror; laser emitted by a stable-frequency laser is split by a beam-splitting cuboid B, reflected by a fixed pyramid B and a moving pyramid B and then gathers in a reference detector; the moving pyramid A and the moving pyramid B do a uniform linear motion together; the main detector is used for collecting aplanatism difference data and performing spectrum reduction and relative diffraction efficiency calculation on the collected data.

Description

technical field [0001] The invention belongs to the field of spectrum technology, and in particular relates to a Fourier transform plane grating relative diffraction efficiency tester. Background technique [0002] Due to its excellent performance, grating spectrometers are widely used in spectral analysis, frontier interdisciplinary subjects, social and people's livelihood and other fields. Among them, the diffraction grating (hereinafter referred to as the grating) is the core component of the grating spectrometer, and its performance parameters directly affect the performance of the spectrometer. There are many main indicators of the grating, including diffraction efficiency, diffraction wavefront, resolution, stray light intensity and ghost lines Intensity, among the above indicators, the diffraction efficiency determines the energy transmission capability of the spectrometer, and is one of the most important technical indicators for evaluating the performance of the gra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 齐向东马振予唐玉国李晓天于海利崔继承
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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