Gas cylinder replacing system and method

A gas cylinder and gas type technology, which is applied in the direction of collaborative operation of devices, instruments, calculations, etc., and can solve problems such as gas cylinder replacement errors.

Active Publication Date: 2015-03-25
FOUNDER MICROELECTRONICS INT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Embodiments of the present invention provide a gas cylinder replacement system and method thereof to solve the problem of incorrect gas cylinder replacement in the prior art

Method used

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  • Gas cylinder replacing system and method

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Embodiment 1

[0042] Embodiment 1 provides a gas cylinder replacement system, such as figure 1 As shown, it is a schematic structural diagram of the gas cylinder replacement system, which specifically includes: two readers, two gas cylinder fixing devices, display devices and central management devices. in,

[0043] The two readers are installed on the gas cylinder rack, and by adjusting the relevant parameters of the reader, the reader installed on the left side of the gas cylinder rack reads the The label on the gas cylinder, the reader installed on the right side of the gas cylinder rack reads the label on the gas cylinder placed on the right side of the gas cylinder rack, without misreading the gas cylinder on the opposite side of the gas cylinder and other gas cylinders. Label information on cylinders placed in bottle racks.

[0044] Wherein, the label information of the label on the gas cylinder is adapted to the gas type filled in the gas cylinder, and the label information of the ...

Embodiment 2

[0061] In Embodiment 2 of the present invention, a method for replacing a gas cylinder is provided, such as figure 2 As shown, the flow chart of the method steps for gas cylinder replacement provided by Embodiment 2 of the present invention specifically includes the following steps:

[0062] Step 101: two readers respectively read the tags on the gas cylinders, and send the read tag information and their own identification to the central management device.

[0063] Wherein, the two readers are installed on the gas cylinder rack, the reader installed on the left side of the gas cylinder rack reads the label on the gas cylinder placed on the left side of the gas cylinder rack, and is installed on the right side of the gas cylinder rack The reader reads the tags on the cylinders placed on the right side of the cylinder rack.

[0064] Step 102: The central management device matches the received label information of the tag with the reader-writer identifier according to the corre...

Embodiment 3

[0069] The following describes the gas cylinder replacement process in detail in combination with specific application scenarios.

[0070] Assume that the type of gas required to be provided on the left side of the gas cylinder rack is A, the type of gas required to be provided on the right side of the gas cylinder rack is B, the type of gas filled in gas cylinder A is A, and the type of gas filled in gas cylinder B is B; and the reader A is installed on the left side of the gas cylinder rack, and the reader B is installed on the right side of the gas cylinder rack, wherein, the reader A can only read the gas located on the left side of the gas cylinder rack. For the label information on the bottle, the reader B can only read the label information on the gas cylinder located on the right side of the gas cylinder rack.

[0071] Scenario 1: The gas cylinder is replaced correctly

[0072] Specifically, when changing the gas cylinder on the left side of the gas cylinder rack, if ...

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PUM

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Abstract

The invention discloses a gas cylinder replacing system and method. The gas cylinder replacing method mainly comprises the steps that a central managing device executes information processing and matching through the label information, acquired through a reader-writer in the gas cylinder replacing system, of a gas cylinder on the same side of the reader-writer on a gas cylinder frame and the identification of the reader-writer, during matching, a display device and a gas cylinder fixing device are informed of a matching result, and whether the gas cylinder is allowed to be replaced or not is prompted. Thus, the dependency on operators in the gas cylinder replacing process is relieved, the operators can be reminded to correct when the gas cylinder is replaced wrongly in time, and therefore the accident probability caused by wrong steel cylinder replacing is decreased.

Description

technical field [0001] The invention relates to the technical field of chemical and gas supply required by process machines in semiconductor industry factories, in particular to a system and method for replacing gas cylinders. Background technique [0002] At present, special gases are used in many production processes, such as inert gases: He, Ar, SF6, etc., corrosive gases HBr, HCI, NF3, etc., in addition, it also includes a variety of flammable gases, spontaneous combustion gases and other special gases. Because of the inconsistent properties of these gases, and because each gas has different requirements for its own environment, it can only be stored in specific cylinders with limited capacity. [0003] When the gas in the gas cylinder is used up, the gas cylinder needs to be replaced. However, in the process of gas cylinder replacement, due to the operator's identification error, it may lead to a wrong replacement of the gas cylinder, and in the process of production, ...

Claims

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Application Information

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IPC IPC(8): G06K17/00
Inventor 贾文君
Owner FOUNDER MICROELECTRONICS INT
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