Graphene oxide based capacitive temperature sensor and production method thereof

Abstract

The invention discloses a graphene oxide based capacitive temperature sensor and a production method thereof. The capacitive temperature sensor comprises a substrate, lower electrodes, an insulation layer, a graphene oxide layer and a graphene layer from the bottom to the top successively. The lower electrodes are divided into two parts which are not in contact, that is, a left lower electrode and a right lower electrode. The left lower electrode and the insulation layer, the graphene oxide layer and the graphene layer form a left plate capacitor structure. The right lower electrode and the insulation layer, the graphene oxide layer and the graphene layer form a right plate capacitor structure. The left plate capacitor structure and the right plate capacitor structure are connected in series to be output. According to the temperature sensor and the production method thereof, a sandwich structure is used as the sensitive capacitor, so that the sensor sensitivity is high; the electrodes on the sensitive capacitor are formed by the graphene oxide layer, and accordingly, during electric conduction, moisture is separated, and temperature and humidity cross sensitivity is prevented; the graphene oxide layer is produced through chemical reduction of the graphene oxide upper surface, therefore, the process is simple.

Description

technical field [0001] The invention relates to a capacitive temperature sensor based on graphene oxide and a preparation method thereof, belonging to micro-electromechanical technology. Background technique [0002] Temperature sensors are widely used in many fields such as industry, agriculture, meteorology, transportation, and household appliances. Compared with resistive temperature sensors, capacitive temperature sensors have high sensitivity and low power consumption. [0003] The temperature change can be converted into capacitance change by using the characteristic that the dielectric constant of the sensitive material changes with temperature. In 1996, Vaisala (company name) in the Netherlands proposed a capacitive temperature sensor structure based on temperature-sensitive ceramics. In 2009, D.W.Lee (name) and others proposed that the dielectric constant of graphene oxide varies with temperature; therefore, graphene oxide can be used as a sensitive material for c...

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Problems solved by technology

The manufacturing process of this capacitive temperature sensor is complicated, and the temperature and humidity are cross-sensitive, so the application has limitations

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