Three-dimensional integrated inductance structure
An integrated inductance, three-dimensional technology, applied in circuits, electrical components, electric solid devices, etc., can solve the problems of improving the quality factor Q value and unable to reduce the eddy current.
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[0026] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.
[0027] In order to reduce the eddy current while increasing the inductance magnetic flux to increase the inductance value, and improve the quality factor Q value and the performance of the inductance coil, the present invention provides a three-dimensional integrated inductance structure, including: a semiconductor substrate, on which The surface is prepared with an insulating layer; the magnetic core is arranged in the insulating layer and parallel to the semiconductor substrate; the inductance coil is in the shape of a three-dimensional spiral and surrounds the magnetic core in multiple turns in one direction, and the magnetic core includes several parallel arrangements The magnetic core unit, the inductance coil passes through the insulating layer and surrounds several magnetic core units in o...
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