Device and testing method for testing fast response characteristics of gas sensor

Abstract

The invention discloses a device for testing fast response characteristics of a gas sensor. The device comprises a ventilating chamber, a valve in the ventilating chamber and a motor on the outer side of the ventilating chamber, wherein a power output shaft of the motor runs through a first wall of the ventilating chamber and is fixedly connected to the middle of the valve; the valve is attached with the second wall of the ventilating chamber, and the first wall and the second wall are opposite; a gas outlet is formed on the second wall of the ventilating chamber; gas inlet holes are formed on the wall of the ventilating chamber; the valve is driven to rotate by the motor; and the gas outlet can be completely covered by the valve. The device disclosed by the invention realizes continuous and rapid switching on the basis of chopping characteristics, thus testing the fast response characteristics of the gas sensor. Furthermore, the invention discloses a testing method of the device, and through the method, characteristic tests on sub-second and even millisecond grades of the gas sensor are realized.

Description

technical field [0001] The invention belongs to the technical field of advanced semiconductor material testing technology, and in particular relates to a device and a testing method for testing the fast response characteristics of a gas sensor device. Background technique [0002] Ordinary gas sensor devices are generally used to detect the content of one or more gases or the content of a certain component in a liquid. For example, detecting the leakage of flammable gases such as liquefied petroleum gas, detecting the leakage of toxic gases such as hydrogen sulfide and carbon monoxide, and detecting the content of polluting gases in the air, etc. Gas sensing devices play an important role in these applications. For general applications, the response time of the sensor is generally on the order of tens of seconds to tens of seconds, and this relatively long response time does not affect the use of the sensor device. [0003] In some applications, fast sensor response become...

AI Technical Summary

Problems solved by technology

The rapid progress of this process requires specially matched high-speed valves, because it is generally difficult for mass flowmeters to achieve sub-second response and stability

However, currently no valve can achieve sub-second or millisecond response speed

In addition, when the general air valve is opened and closed, the air flow in the test chamber will be disturbed and accompanied by the vibration of the chamber

These factors limit the usefulness of existing gas valves for high-speed sensor-response device testing

At present, there is no effective method to achieve rapid gas switching in the cavity, especially sub-second and sub-millisecond gas switching

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