Intensive assembling cabinet for large semiconductor equipment

Abstract

The invention relates to an intensive assembling cabinet for large semiconductor equipment. The intensive assembling cabinet comprises a cabinet frame, an outer shell which is wrapped on the periphery of the cabinet frame, and an internal frame arranged in the cabinet frame. The internal frame divides the cabinet frame into a first radiating channel placed on the upper side, a power supply part and a control cabinet, wherein the power supply part and the control cabinet are placed on the lower side and are distributed left and right. The power supply part is connected with the control cabinet through a cable, the power supply part is placed in a stacking mode, and a maintenance space is reserved between the power supply part and the control cabinet. The control cabinet is in a self-rotating mode. According to the intensive assembling cabinet for the large semiconductor equipment, the front face and the back face of the power supply part are maintained through organization layout and the reserved maintenance space, and the rotating function of the control cabinet in the self-rotating mode is used for maintaining the front face and the back face of the control cabinet. The first radiating channel is used for pumping and draining the heat of the power supply part and the control cabinet. Meanwhile, space units for radiating, maintaining and cable placing are merged, and therefore intensive assembling is achieved.

Description

technical field [0001] The invention relates to the field of semiconductor equipment, in particular to a large-scale semiconductor equipment intensive assembly cabinet. Background technique [0002] At present, most of the equipment in the semiconductor industry relies on complex and large-scale control systems to operate, resulting in the need to provide a large amount of space for the control chassis, power supply chassis, interconnection cables, and maintenance areas, etc., which increases the overall equipment to a certain extent. size of. [0003] Some of the existing equipment has been designed with the above problems in mind. The separately designed electrical cabinet in the equipment installs the sub-system chassis in a centralized area, and the electrical cabinet is placed where the whole equipment is easy to push and pull out, which solves a certain installation space. The problem of waste, but because the size of the space required by the push-pull range basicall...

AI Technical Summary

Problems solved by technology

[0004] The present invention provides an intensive assembly cabinet for large-scale semiconductor equipment to solve the phenomenon of separation of functional areas caused by cumbersome power supply equipment involved in large-scale control systems, many control boxes, many interconnecting cables, and many maintenance and operation surfaces.

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