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Deposition Device And Mask Assembly Applied Thereto

A deposition device and mask assembly technology, which is applied to electrical components, electrical solid devices, semiconductor devices, etc., can solve problems such as shadow effect and color mixing, and achieve the effect of preventing shadow effect and solving color mixing.

Active Publication Date: 2014-10-15
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, a shadow effect occurs, for example, which causes a film pattern having a size larger or smaller than a desired film pattern when depositing a deposition material on a substrate through a mask, and which causes color mixing when an organic light emitting display device emits light. And other issues

Method used

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  • Deposition Device And Mask Assembly Applied Thereto
  • Deposition Device And Mask Assembly Applied Thereto
  • Deposition Device And Mask Assembly Applied Thereto

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Embodiment Construction

[0046] Embodiments and features of the present invention and methods for achieving the same can be more easily understood by referring to the following detailed description of the preferred embodiments and accompanying drawings. However, this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of the invention to those skilled in the art, and the present invention will be limited only by the claims and their equivalents.

[0047]It will also be understood that when a layer is referred to as being "on" another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. Throughout the specification, the same reference numerals refer to the same components.

[0048] It will be understood that although the terms first, second, t...

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Abstract

The present invention provides a deposition device and a mask assembly applied thereto. The deposition device comprises a mask frame possessing a frame opening; a mask combined with the upper surface of the mask frame and configured to cover the frame opening; an extending component arranged on at least one part of an edge of the frame opening and configured to protrude from the upper surface of the mask frame, and enable the vertical distance of a first part corresponding to the frame opening of the mask to be greater than the vertical distance of a second part contacted with the upper surface of the mask frame of the mask, wherein each vertical distance is measured from the upper surface of the mask frame.

Description

technical field [0001] The following description relates to a deposition apparatus and a mask assembly applied to the deposition apparatus. Background technique [0002] Although many different types of display devices exist, organic light-emitting display devices, which are self-luminous display devices, have attracted attention as next-generation display devices due to their own advantages in having a wide viewing angle, excellent contrast ratio, and high response speed. . [0003] An organic light emitting display device includes an intermediate layer including at least one light emitting layer between electrodes facing each other. Electrodes and intermediate layers can be formed in various methods, and one of these methods is a deposition method. [0004] The deposition method is a method of forming a film of a desired pattern by depositing a deposition material on a substrate using a mask having the same opening pattern as that of a film to be located on the substrate...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04H01L51/56
CPCC23C14/042
Inventor 韩政洹
Owner SAMSUNG DISPLAY CO LTD
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