Device and method for detecting particles in air and wearable equipment comprising device

Abstract

The invention discloses a device and a method for detecting particles in air and wearable equipment comprising the device. The device comprises an upper part, a lower part, at least one light emitting element and at least one light sensing element, wherein the upper part and the lower part are made of silicon base materials; a measurement chamber formed between the upper part and the lower part comprises side surfaces, an upper surface and a lower surface; the upper surface and the lower surface are parallel to each other; the side surfaces are inclined relative to the upper surface; each light emitting element is arranged in the measurement chamber and comprises a first side surface with an emitting port; the emitting port is used for emitting light which is parallel to the upper surface and faces the side surfaces; each light sensing element is positioned in the measurement chamber and is adjacent to a second side surface, opposite to the first side surface, of the corresponding light emitting element; light emitted by each light emitting element is scattered to the corresponding light sensing element by virtue of particles; each light sensing element is used for detecting a signal of light scattered to the corresponding light sensing element by virtue of particles to obtain a particle detection result.

Description

technical field [0001] The invention relates to the fields of smoke detection, preventive medicine, lighting, wearable electronics, etc., and in particular to a method and device for detecting particles in the air, and a wearable device including the device. Background technique [0002] Most of the existing particulate matter (PM) sensors are based on microelectromechanical systems (MEMS), which usually include the following components: microfluidic channels for separating particles according to particle size; microfabricated thin-film bulk acoustic resonators ( FBAR), to which the FBAR is mass-sensitive, i.e., mass loading on the FBAR causes its resonant frequency to change at a rate corresponding to the particle concentration in the sampled air volume; and a CMOS driver, to which the FBAR is connected as a Pierce oscillator device. [0003] A particulate matter sensor is a three-piece stacked MEMS using FBAR, which can measure the mass concentration of PM2.5 with a sensi...

AI Technical Summary

Problems solved by technology

[0010] 3) Personal information: For different individuals, long-term and short-term exposures in the environment may vary greatly, so no single standard or guideline can completely protect everyone

And existing low-cost, portable particulate matter sensors, such as inexpensive UV meters or thermometers that sell for a few dollars, can only give rough readings with poor accuracy

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