Multifrequency aliasing resisting high-precision synchronous measuring scale semiconductor laser ranging device and method

Abstract

The invention discloses a multifrequency aliasing resisting high-precision synchronous measuring scale semiconductor laser ranging device and method, and belongs to a phase laser ranging technology. The ranging device comprises a measuring scale generating unit, a laser frequency shifting unit, an anti-aliasing measuring light path and a phase measuring unit. The ranging method comprises the first step that a frequency standard laser and frequency-offset-lock semiconductor lasers are started, the second step that one beam is adopted as a reference laser beam, and the other beam is adopted as measuring lasers, the third step that c / |v2-v3| is adopted as an accurate measuring scale, the fourth step that c / |v1-v2| is adopted as a rough measuring scale, and the fifth step that a measuring angle cone prism is moved to a target end, the phase difference phi1 of the accurate measuring scale and the phase difference phi2 of the rough measuring scale are obtained respectively, and finally the measured distance value is obtained through the formula. The problem that an overlarge wave length and an over-small wave length cannot be generated synchronously and the laser measuring scales cannot directly trace to the source, and the problem of the nonlinear circular error and frequency aliasing are solved, and the multifrequency aliasing resisting high-precision synchronous measuring scale semiconductor laser ranging device and method have the advantages of being high in measuring efficiency, high in precision and high in stability and real-time performance.

Description

technical field [0001] The invention belongs to phase laser measurement technology, and mainly relates to a phase laser distance measuring device and method. Background technique [0002] Large-scale measurement has attracted much attention in the development of large-scale precision machinery manufacturing, major scientific and technological projects, aerospace industry, shipbuilding industry and microelectronic equipment industry and other large-scale optical-mechanical-electrical integration equipment processing and manufacturing. It is an important basis for the processing and overall assembly of large parts in aerospace vehicles and giant ships. The quality of its measurement methods and equipment performance directly affect the quality of workpieces and assembly accuracy, which in turn affects the operating quality, performance and life of the entire set of equipment. The multi-ruler phase ranging method uses a group of measuring ruler wavelengths from large to small t...

AI Technical Summary

Problems solved by technology

[0011] The purpose of the present invention is to solve the problems that the ultra-long wavelength and ultra-short wavelength cannot be synchronously generated in the existing phase laser ranging technology, the laser measuring ruler cannot be directly traced to the source, and the problems of nonlinear periodic error and frequency aliasing are provided. Anti-multi-frequency aliasing high-precision synchronous ruler semiconductor laser ranging device and method to achieve the purpose of increasing the flexibility of ranging, simplifying the steps of ranging, and improving measurement efficiency, accuracy and real-time performance

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