Plasma processing assembly including hinge assembly
A technology of plasma and hinge body, which is applied in the direction of plasma, electrical components, multi-purpose hand tools, etc.
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[0015] Figure 1 generally depicts one embodiment of a plasma processing assembly for etching material from and / or depositing material on a substrate. Plasma processing assemblies typically include an upper processing body pivotally engaged with a lower processing body by a hinge assembly. According to embodiments described herein, a hinge assembly generally includes a base hinge member pivotally engaged with a hinge body and a self-latch latch pivotally engaged with the base hinge member. Various embodiments of plasma processing assemblies and the operation of plasma processing assemblies are described in greater detail herein.
[0016] common reference Figure 1A and 1B , the plasma processing assembly 10 includes a lower processing body 20 having a lower vacuum chamber 22 formed in the lower processing body 20 for enclosing plasma processing. In plasma processing such as etching or deposition, the lower vacuum chamber 22 can enclose a plasma processing gas, for example, th...
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