Anti-optical aliasing device and method for phase laser ranging with traceable precision measuring scale

Abstract

Anti-aliasing anti-aliasing precision measuring ruler phase laser ranging device and method belong to the phase laser ranging technology, the distance measuring device includes a ruler generation unit, a laser frequency shift unit, an anti-aliasing measurement optical path and a phase measurement unit ; Its ranging method comprises steps as follows: Step 1, open frequency reference laser and He-Ne laser; Step 2, one beam as reference laser beam, another beam as measuring laser; Step 3, with As a precise measuring ruler; step 4, take As a rough measuring ruler; step 5, move the measuring corner cone prism to the target end, and obtain the phase difference between the fine measuring ruler and the coarse measuring ruler respectively Φ 1 and Φ 2 , and finally the measured distance value is obtained through the formula; the invention solves the problems that the ultra-long wavelength and ultra-short wavelength cannot be synchronously generated, the laser measuring ruler cannot be directly traced to the source, and the problems of nonlinear periodic error and frequency aliasing have high measurement efficiency and high precision , stability and real-time characteristics.

Description

technical field [0001] The invention belongs to phase laser measurement technology, and mainly relates to a phase laser distance measuring device and method. Background technique [0002] Large-scale measurement has attracted much attention in the development of large-scale precision machinery manufacturing, major scientific and technological projects, aerospace industry, shipbuilding industry and microelectronic equipment industry and other large-scale optical-mechanical-electrical integration equipment processing and manufacturing. It is an important basis for the processing and overall assembly of large parts in aerospace vehicles and giant ships. The quality of its measurement methods and equipment performance directly affect the quality of workpieces and assembly accuracy, which in turn affects the operating quality, performance and life of the entire set of equipment. The multi-ruler phase ranging method uses a group of measuring ruler wavelengths from large to small t...

AI Technical Summary

Problems solved by technology

[0011] The purpose of the present invention is to solve the problems that the ultra-long wavelength and ultra-short wavelength cannot be synchronously generated in the existing phase laser ranging technology, the laser measuring ruler cannot be directly traced to the source, and the problems of nonlinear periodic error and frequency aliasing are provided. Anti-optical aliasing traceable precision ruler phase laser ranging device and method, to achieve the purpose of increasing the flexibility of ranging, simplifying the steps of ranging, and improving measurement efficiency, accuracy and real-time performance

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