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Sensing acceleration sensor with temperature compensation based on acoustic surface waves

A technology of acceleration sensor and surface acoustic wave, which is applied in the direction of using inertial force for acceleration measurement, etc., can solve the problems that it cannot be used to monitor vibration and does not have temperature compensation function, and achieves simple structure, low production cost and high measurement accuracy. Effect

Inactive Publication Date: 2014-08-27
CHANGZHOU SMARTSAW SENSING TECH
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AI Technical Summary

Problems solved by technology

Although it can be used in this application, this design can only be used to monitor the occurrence of vibration at a specific frequency, not can be used to monitor vibration in a wide frequency range, and does not have temperature compensation function

Method used

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  • Sensing acceleration sensor with temperature compensation based on acoustic surface waves
  • Sensing acceleration sensor with temperature compensation based on acoustic surface waves
  • Sensing acceleration sensor with temperature compensation based on acoustic surface waves

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and given embodiments, but is not limited thereto.

[0025] Such as figure 1 , 2 , 3, and 4, a sensory acceleration sensor with temperature compensation based on surface acoustic waves, including a housing 1 and a housing cover 2, the housing 1 and the housing cover 2 are hermetically connected,

[0026] a. It also includes a piezoelectric substrate 3, a piezoelectric film 6, a base 8 and three surface acoustic wave resonators 4, the piezoelectric film 6 is arranged on the upper surface of the piezoelectric substrate 3, and the base 8 Fixed on the bottom surface of the housing 1, one end of the piezoelectric substrate 3 is a fixed end, the other end is an overhanging end, one end of the piezoelectric film 6 and the fixed end of the piezoelectric substrate 3 are fixed on the base 8 , and higher than the bottom surface of the housing 1;

[0027] b. At least one surface a...

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Abstract

The invention relates to a sensing acceleration sensor with temperature compensation based on acoustic surface waves. The sensor comprises a shell and a shell cover which are connected in a sealing mode and further comprises a piezoelectric substrate, a piezoelectric film, a base and three acoustic surface wave resonators. The piezoelectric film is arranged on the upper surface of the piezoelectric substrate, the base is fixed on the bottom face in the shell, one end of the piezoelectric substrate is a fixed end, the other end of the piezoelectric substrate is an overhanging end, one end of the piezoelectric film and the fixed end of the piezoelectric substrate are both fixed to the base, and are higher than the bottom face in the shell, at least one acoustic surface wave resonator is arranged on the upper surface of the piezoelectric film, and the surplus acoustic surface wave resonators are arranged between the piezoelectric film and the piezoelectric substrate, resonant frequencies of the three acoustic surface wave resonators are different, the acoustic surface waves generated by the three acoustic surface wave resonators are spread in the direction x, and the direction x is the extending direction from the fixed end of the piezoelectric substrate to the overhanging end of the piezoelectric substrate. The sensing acceleration sensor has the advantages of being capable of monitoring acceleration and temperature and high in measuring precision.

Description

technical field [0001] In particular, the present invention relates to a sensing acceleration sensor with temperature compensation based on surface acoustic waves. Background technique [0002] Existing real-time structural health monitoring (SHM) is key to the control of many industrial processes. In many industrial applications, it is very important to monitor the health of mechanical components in motion, such as the real-time monitoring of the vibration status of loaded bearings of high-speed train wheels. Replacing the current Schedule Based Maintenance (SBM) with Condition Based Maintenance (CBM) is an effective way to reduce maintenance and operating costs. In all of these cases, real-time health monitoring with multiple types of sensors is key to maximizing continuous uptime. The compact, wireless and passive sensors are especially suitable for continuous and real-time real-time structural health monitoring in hazardous environments, such as outdoor harsh weather e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/09
Inventor 高翔刘文
Owner CHANGZHOU SMARTSAW SENSING TECH
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