Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle

Abstract

The invention relates to a precise two-dimensional motion occasion, can be used for precise displacement compensation of a general X-Y motion platform and particularly relates to a stiffness frequency adjustable two-dimensional micro-motion platform based on a stress stiffening principle. The stiffness frequency adjustable two-dimensional micro-motion platform based on the stress stiffening principle comprises X-direction and Y-direction motion sub-platforms, corresponding drivers and a micro-motion working platform, utilizes a film group for adjusting tensile force through screws as a flexible chain and achieves independent adjustment of vibrating frequency. By adopting the structure, the stiffness frequency adjustable two-dimensional micro-motion platform is based on prestress films, is adjustable in frequency and can adjust the inherent frequency of the micro-motion platform according to different working conditions and driving frequencies before working or in the working process, two feeding motion directions are orthogonal, and coupling of the micro-motion working table during two-dimensional motion is avoided.

Description

technical field [0001] The invention relates to a precision motion platform, which can be used for precise operation and macro-micro compound high-speed precision compensation. The invention specifically relates to a two-dimensional micro-motion platform with adjustable stiffness and frequency based on the principle of stress stiffening. Background technique [0002] In order to realize two-dimensional precision motion, an accurate and stable feed mechanism is particularly important, because it is closely related to the quality of the product. In addition, due to the small size and high precision of the complex optical free-form surface, strict requirements are placed on the micro-feed mechanism. The micro-feed system is the basis for processing such products, and it is widely used in fast-tool servo feed systems, micro-motion worktables, and macro-micro composite platforms. The traditional two-dimensional micro-feeding device usually adopts a fixed frequency design, which ...

AI Technical Summary

Problems solved by technology

The traditional two-dimensional micro-feeding device usually adopts a fixed frequency design, which puts forward extremely high requirements on material characteristics and manufacturing errors. Especially when processing different products, its driving frequency usually changes, so that the displacement amplification factor of the fixed frequency motion platform Inconsistent, which makes the displacement amplification distortion

In addition, the motion coupling of the existing two-dimensional micro-motion platform based on flexible hinges is complicated, and it is difficult to meet the needs of high-speed precision motion.

Images