An in-situ measurement method for large-scale flatness

Abstract

The invention provides an in-suit measuring method of large size planeness. The method comprises the steps as follows: two station laser trackers are arranged near the tested plane; a height difference is formed between the two station laser trackers relative to the tested plane; system errors of the two station laser trackers are automatically calibrated; the two station laser trackers are arranged at two different positions near the tested plane, and respectively measure coordinates of the same tested points on the tested plane, so as to respectively obtain first position coordinate data and second position coordinate data of the two station laser trackers; error compensation is carried out on the second position coordinate data by using the first position coordinate data, so as to obtain compensated coordinate data; and the compensated coordinate data are calculated, so as to obtain the planeness of the tested plane. The measurement data error of the other station is compensated by one station, so that the planeness measurement accuracy is improved. The in-suit measuring method is simple and efficient to measure, and easy to achieve, and especially has important application value in in-suit detection of the large size planeness in the machining process.

Description

technical field [0001] The invention belongs to the field of precision measurement and relates to a high-precision measurement method for large-size flatness, and is especially suitable for high-precision on-site detection of large-size flatness during processing. Background technique [0002] A large-sized plane refers to a plane of several meters or even tens of meters. Compared with the conventional size, large workpieces are difficult to move. Therefore, the testing occasion has shifted from the metrology laboratory to the large-scale industrial manufacturing site with many interference factors. The measuring equipment and system must be carried out on site. Formation, calibration and value transfer. At the same time, extremely high measurement accuracy requirements (micron level), diversity of measured objects, and measurement efficiency are also important challenges in large-scale flatness measurement. Therefore, large-scale flatness precision measurement technology ha...

AI Technical Summary

Problems solved by technology

This method is suitable for flatness error measurement of large and medium-sized planes, and has high precision; the disadvantage is that the measurement efficiency is low, and only continuous planes can be measured

[0010] In summary, the existing large-scale flatness detection methods cannot meet the urgent detection tasks and measurement problems due to the applicable size, efficiency, precision, cost, technology and other reasons.

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