Method for adjusting temperature by increasing gas molecular density
An adjustment method and technology of gas density, applied in the direction of temperature control, heating method, application, etc. using electric mode, can solve the problems of known cooling process, etc., and achieve the effect of reducing manufacturing cost, saving consumption, and reducing equipment cost
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[0039] In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.
[0040] According to one embodiment of the present invention, figure 1 A schematic diagram of a temperature conditioning processing system 100 is shown. The temperature adjustment processing system 100 may include a processing chamber 1 and a feedback temperature adjustment device 3 . The processing chamber 1 is connected to a feedback temperature adjustment device 3 via a gas pipeline 5 . The gas in the processing chamber 1 can flow into the feedback temperature adjustment device 3 through the gas pipeline 5 . One or more filters 7 may be further arranged between the processing chamber 1 and the feedback temperature adjustment device 3 to filter the gas flowing out of the chamber 1 . The feedback temperature adjustment device 3 may ...
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