A kind of preparation method of yttrium oxycalcium borate crystal (ycob) high laser damage threshold anti-reflection film

A calcium yttrium triborate, laser damage threshold technology, applied in the direction of ion implantation plating, coating, metal material coating process, etc. Reduce and other problems, achieve good economic benefits, high damage threshold, and reduce the effect of microscopic damage

Active Publication Date: 2015-12-09
TONGJI UNIV
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Problems solved by technology

[0004] Due to the anisotropy of YCOB crystals and large differences in thermal expansion coefficients, the film is prone to cracking and poor adhesion, and defects and impurities are easily introduced during the entire preparation process, resulting in a lower film damage threshold. Therefore, the applicant through substrate etching, substrate The whole process control process of ultra-smooth polishing, substrate ultrasonic cleaning, substrate ion beam etching, substrate ion beam cleaning, electron beam evaporation coating to improve the damage threshold and mechanical properties of the antireflection coating on the surface of YCOB crystal

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  • A kind of preparation method of yttrium oxycalcium borate crystal (ycob) high laser damage threshold anti-reflection film

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[0025] The present invention is described in further detail by specific examples, as follows:

[0026] YCOB crystal 1064nm and 527nm dual-wavelength anti-reflection coating coating

[0027] 1. The YCOB crystal size of the plated sample is 10*10*3mm. The structure of the film system is: SL(HL)^3A, S is the substrate YCOB crystal, A is air, and H is the high refractive index material HfO 2 , L is the low refractive index material SiO 2 , the thickness of each film is 190nm / 54.8nm / 62.53nm / 119nm / 22nm / 165.54, the coating equipment is Japan Optical Chi coating machine OTFC-1800, and the configuration ion source is 17cm radio frequency ion source.

[0028] 2. Plating is performed according to the aforementioned process steps, and the conventionally polished YCOB substrate is etched with an etching solution prepared by mixing hydrofluoric acid and deionized water (volume ratio 1:20), and the etching time is 30 minutes. The substrate after chin etching was cleaned with deionized wat...

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Abstract

The invention discloses a method for preparing an antireflection film having high laser-induced damage threshold on the surfaces of nonlinear yttrium calcium oxytriborate crystals. With respect to strong anisotropy of YCOB crystals and the damage mechanism of the antireflection film, the method comprises the steps of etching a YCOB substrate with hydrofluoric acid, carrying out cold working on the YCOB substrate, etching the YCOB substrate with the ion beam, ultrasonically cleaning the YCOB substrate, cleaning the YCOB substrate with ion beam in vacuum, and plating a film on the YCOB substrate. The YCOB antireflection film prepared by the invention has excellent optical properties, high damage threshold, good environmental stability and can be compatible with the existing substrate processing, cleaning and film preparation process. The YCOB antireflection film has such advantages as good process repeatability, strong controllability and easy popularization and has a broad application prospect in the field of the high-power laser film in the further.

Description

technical field [0001] The invention relates to a method for preparing an optical film, in particular to a method for preparing an anti-reflection film with a high laser damage threshold on the surface of a nonlinear crystal yttrium oxycalcium borate crystal. Background technique [0002] In a strong laser system, the powerful laser energy can easily cause damage to the components in the system, so there is a high requirement for the gain medium to resist laser damage. Yttrium oxycalcium borate (YCOB) crystal has the advantages of high damage threshold, large nonlinear coefficient, wide light transmission band, large phase matching range, and not easy to deliquescence. It has received extensive attention and research in recent years, and has been successfully used in high-power lasers. system. The YCOB crystal has a large refractive index, which will produce strong Fresnel reflection when the laser is incident, which will reduce the energy utilization efficiency and stabili...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/08C23C14/30G02B1/11
Inventor 张锦龙丁涛程鑫彬谢雨江王占山
Owner TONGJI UNIV
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