Three-freedom-degree precision locating platform

Abstract

The invention discloses a three-freedom-degree precision locating platform which comprises a base and a moving platform arranged in the base. The base and the moving platform are connected through three hinge expansion mechanisms evenly distributed in the peripheral direction of the platform and three plate-shaped flexible hinge mechanisms. One end of each hinge expansion mechanism is in flexible connection with the base, the other end of the hinge expansion mechanism is in flexible connection with the moving platform, the middle of the hinge expansion mechanism is provided with the input end, and the input end is connected with a piezoelectric ceramic driver. Each plate-shaped flexible hinge mechanism comprises an arc flexible plate and one to five radial flexible plates perpendicularly fixed to the arc flexible plate. The three-freedom-degree precision locating platform can achieve two horizontal movements and one rotation and is simple and compact in structure. Displacement expansion and force transmission are conducted by utilizing the hinge expansion mechanisms, so that the plate-shaped flexible hinge mechanisms have elastic deformation to drive the moving platform to move and achieve output of micro-nano displacement, the output displacement is large, and axial rigidity is high. The three-freedom-degree precision locating platform can serve as an auxiliary locating platform of a nano-micro operating system to achieve micro-feeding and precise locating.

Description

technical field [0001] The invention belongs to the field of micro-nano technology, and specifically relates to a two-translation-rotation three-degree-of-freedom flexible precision positioning work platform that can be applied to a micro-operating system. Background technique [0002] With the development of science and technology, there is an urgent need for submicron or even nanometer precision positioning technology in the fields of ultra-precision machining, microelectronics engineering, bioengineering, and nanotechnology. The most typical application lies in the manufacture and production of nanometer devices. Nano-devices include nano-electronic devices and nano-optoelectronic devices, which can be widely used in electronics, optics, micro-mechanical devices, new computers, etc. It is the most dynamic research field in the field of new materials and new devices. , intelligence, high integration and other mainstream development directions. Due to the potential huge m...

AI Technical Summary

Problems solved by technology

[0003] However, at present, the micro-nano-scale precision positioning platform mainly uses two-degree-of-freedom translation. Even the designed three-degree-of-freedom precision positioning platform has defects such as complex structure, small stroke, and low axial bearing capacity, which is difficult to meet the requirements of practical applications. need

Images