Air conditioning device for precisely controlling high-efficiency thermo-hygrostat of a clean room by using waste heat

Abstract

The invention relates to an air conditioning device for filtering air supplied to a clean room of a semiconductor manufacturing device and for controlling temperature and humidity, and especially relates to an air conditioning device for precisely controlling a high-efficiency thermo-hygrostat of a clean room by using waste heat. Waste heat discharged from a conventional air conditioning system is recycled to control humidity without supplying additional energy equivalent to the energy of the waste heat. The waste heat is then divided into multiple segments by using coils, condensing coils and steps, so dehumidification loads of an evaporator are changed based on changes of indoor loads or outer air loads, and thus changes of heat in a condenser can be controlled in an effective and precise manner.

Description

technical field [0001] The present invention relates to an air conditioner that filters air supplied to a clean room of semiconductor manufacturing equipment and controls temperature and humidity, and more particularly relates to a constant temperature and humidity device for precise control of waste heat utilization and high efficiency clean room An air conditioner that recovers the waste heat discharged to the atmosphere from the existing air conditioning system, and adjusts the humidity without supplying additional energy equivalent to the waste heat energy. The waste heat recycling coil and the condensing coil are divided into multiple stages in stages (STEP), The dehumidification load of the evaporator can be changed according to the change of the indoor load or the external air load, so that the change of the heat generated in the condenser can be effectively and precisely controlled. Background technique [0002] Generally, products such as semiconductors and liquid c...

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Problems solved by technology

[0006] However, in the case of the outdoor air conditioner, since it consumes a considerable amount of energy, there is a problem that the demand for energy saving cannot be fully met by simply recovering the heat of the discharged gas to preheat or precool the introduced outdoor air.

[0007] Moreover, the cooling load of the clean room is large, and the humidity of the outside air is high in summer, and the dehumidification load occupies most of it. Therefore, in order to adjust the humidity when air conditioning the clean room, the air conditioner is configured so that most of the load is used for cooling, In a system that dehumidifies and reheats with additional heating, the problem of cooling and dehumidification is as follows: for the indoor set temperature and humidity, the indoor set temperature is overcooled to the dew point temperature and dehumidified, and then reheated (Reheating) to the proper temperature, so that due to the opposing effects of cooling and heating, an over-consumption of energy occurs

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